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  "doi": "doi:10.18434/mds2-4250",
  "title": "NIST critical-dimension small-angle X-ray scattering reduction software.",
  "contactPoint": {
    "fn": "Caitlyn Wolf",
    "hasEmail": "mailto:caitlyn.wolf@nist.gov"
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      "tag": "Nanotechnology: Nanoelectronics"
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  "license": "https://www.nist.gov/open/license",
  "publisher": {
    "name": "National Institute of Standards and Technology",
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  "language": [
    "en"
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  "bureauCode": [
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  "programCode": [
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  "theme": [
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    "Mathematics and Statistics: Experiment design",
    "Electronics: Semiconductors",
    "Materials: Polymers",
    "Nanotechnology: Nanoelectronics",
    "Nanotechnology: Nanofabrication/manufacturing",
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  "_editStatus": "done",
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      "familyName": "DeLongchamp",
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  "annotated": "2026-09-21T18:45:09.289434",
  "revised": "2026-09-21T18:45:09.289434",
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