{
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  "ediid": "ark:/88434/mds2-2853",
  "version": "1.0.0",
  "doi": "doi:10.18434/mds2-2853",
  "title": "Data to accompany \"Low Electron Beam Energy X-ray Microanalysis: The Adventure Continues!\"",
  "contactPoint": {
    "fn": "Dale E. Newbury",
    "hasEmail": "mailto:dale.newbury@nist.gov"
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  "modified": "2022-12-06",
  "status": "available",
  "landingPage": "https://data.nist.gov/od/id/mds2-2853",
  "description": [
    "EDS spectra measured at E0 = 5 keV for 75 materials are provided along with the standards used for quantification with the NIST DTSA-II software for electron-excited X-ray microanalysis with energy dispersive spectrometry.",
    "The data sets are organized according to the analytical instrument platform used, and an EDS detector configuration appropriate to each EDS spectrometer is provided . Each folder contains spectra for that specific material and the standards used as well as an Excel file summarizing the DTSA-II results in terms of the raw mass concentrations, normalized mass concentrations, and atomic concentrations. Each calculated compositional value is accompanied by the uncertainty budget as estimated by DTSA-II.",
    "An Excel file (5keV_accuracy_summary_DTSA-II) containing an overall summary of results for all 75 materials is provided."
  ],
  "keyword": [
    "SEM-EDS",
    "SEM",
    "EDS",
    "scanning electron microscopy",
    "energy dispersive X-ray spectrometry",
    "X-ray spectrometry",
    "silicon-drift detector",
    "SDD",
    "low beam energy",
    "low keV"
  ],
  "topic": [
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      "tag": "Metrology: Amount of substance"
    },
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      "scheme": "https://data.nist.gov/od/dm/nist-themes/v1.1",
      "tag": "Materials: Metals"
    },
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      "tag": "Materials: Materials characterization"
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      "scheme": "https://data.nist.gov/od/dm/nist-themes/v1.1",
      "tag": "Materials: Composites"
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      "scheme": "https://data.nist.gov/od/dm/nist-themes/v1.1",
      "tag": "Materials: Ceramics"
    },
    {
      "@type": "Concept",
      "scheme": "https://data.nist.gov/od/dm/nist-themes/v1.1",
      "tag": "Chemistry: Analytical chemistry"
    }
  ],
  "accessLevel": "public",
  "license": "https://www.nist.gov/open/license",
  "publisher": {
    "name": "National Institute of Standards and Technology",
    "@type": "org:Organization"
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  "language": [
    "en"
  ],
  "bureauCode": [
    "006:55"
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  "programCode": [
    "006:052"
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  "theme": [
    "Metrology: Amount of substance",
    "Materials: Metals",
    "Materials: Materials characterization",
    "Materials: Composites",
    "Materials: Ceramics",
    "Chemistry: Analytical chemistry"
  ],
  "components": [
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      "@id": "cmps/5keV_Analysis_Spectrum_Archive.zip",
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      "filepath": "5keV_Analysis_Spectrum_Archive.zip",
      "downloadURL": "https://data.nist.gov/od/ds/mds2-2853/5keV_Analysis_Spectrum_Archive.zip",
      "mediaType": "application/x-zip-compressed",
      "format": {
        "description": "ZIP file"
      },
      "description": "A collection of 5 keV electron excited X-ray spectra measured on an energy dispersive X-ray spectrometer with the necessary standards and meta-data.",
      "title": "5 keV X-ray spectra",
      "size": 2909415,
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  "_editStatus": "done",
  "authors": [
    {
      "familyName": "Newbury",
      "fn": "Dale E. Newbury",
      "givenName": "Dale",
      "middleName": "E.",
      "affiliation": [
        {
          "title": "National Institute of Standards and Technology",
          "subunits": [
            "Materials Measurement Science Division"
          ],
          "@type": "org:Organization",
          "@id": "ror:05xpvk416"
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      ],
      "orcid": "0000-0003-3865-4344",
      "@type": "foaf:Person"
    },
    {
      "familyName": "Ritchie",
      "fn": "Nicholas W. M. Ritchie",
      "givenName": "Nicholas",
      "middleName": "W. M.",
      "affiliation": [
        {
          "title": "National Institute of Standards and Technology",
          "subunits": [
            "Materials Measurement Science Division"
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  "annotated": "2023-01-11T21:57:18.669465",
  "revised": "2023-01-11T21:57:18.669465",
  "issued": null,
  "firstIssued": "2023-01-11T21:57:18.669465"
}