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  "version": "1.0.0",
  "doi": "doi:10.18434/mds2-3631",
  "title": "NIST SRM 2135c Hyperspectral Tomography Tilt Series",
  "contactPoint": {
    "fn": "Andrew Herzing",
    "hasEmail": "mailto:andrew.herzing@nist.gov"
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  "modified": "2024-11-05",
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  "description": [
    "Energy dispersive X-ray spectroscopy (EDX) tomographic tilt series of a needle-shaped sample extracted from NIST SRM 2135c.",
    "Sample description: This SRM consists of alternating layers of nickel and chromium on a silicon substrate (see SRM certificate for further detail).",
    "Data description.  The scan size for each spectrum image (SI) is 128 pixels x 100 pixels and 4000 spectral channels deep. EDX data were collected using the following parameters:",
    "Beam energy (keV): 300.0\nProbe current: 0.5 nA\nPixel size: 3.0 nm\nDwell time per pixel: 200 msec\nEnergy resolution: 10 eV/channel",
    "The SI's were collected over a 180 degree range of specimen tilts with a 5 degree tilt step between each acquisition."
  ],
  "keyword": [
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    "EDX",
    "STEM",
    "3-D imaging",
    "electron microscopy"
  ],
  "theme": [
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    "Nanotechnology: Nanomaterials",
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    "Materials: Materials characterization"
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  "license": "https://www.nist.gov/open/license",
  "publisher": {
    "name": "National Institute of Standards and Technology",
    "@type": "org:Organization"
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  "language": [
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  "bureauCode": [
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  "programCode": [
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  "authors": [
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      "familyName": "Herzing",
      "fn": "Andrew  Herzing",
      "givenName": "Andrew",
      "middleName": "",
      "affiliation": [
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  "annotated": "2025-04-04T21:33:30.192895",
  "revised": "2025-04-04T21:33:30.192895",
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