{
  "_schema": "https://data.nist.gov/od/dm/nerdm-schema/v0.7#",
  "@context": [
    "https://data.nist.gov/od/dm/nerdm-pub-context.jsonld",
    {
      "@base": "ark:/88434/mds2-3725"
    }
  ],
  "@type": [
    "nrdp:DataPublication",
    "nrdp:PublicDataResource",
    "dcat:Dataset"
  ],
  "_extensionSchemas": [
    "https://data.nist.gov/od/dm/nerdm-schema/pub/v0.7#/definitions/PublicDataResource"
  ],
  "@id": "ark:/88434/mds2-3725",
  "ediid": "ark:/88434/mds2-3725",
  "version": "1.1.1",
  "doi": "doi:10.18434/mds2-3725",
  "title": "Data for A Dual Mode Brillouin/Low-Frequency Raman Spectroscopy Microscope for Local Mechanical Property Imaging for Semiconductor Packaging Materials ",
  "contactPoint": {
    "fn": "Sebastian Engmann",
    "hasEmail": "mailto:sebastian.engmann@nist.gov"
  },
  "modified": "2025-02-27 00:00:00",
  "status": "available",
  "landingPage": "https://data.nist.gov/od/id/mds2-3725",
  "description": [
    "This dataset contains Brillouin light scattering (BLS) and low-frequency Raman (LFR) spectroscopy measurements as collected using a custom-built microscope and spectrometer platform. The platform is used to investigate the mechanical properties of semiconductor packaging materials. This dual-mode microscope is capable of both in situ temporal and hyperspectral imaging acquisition modes. The in situ temporal mode is used to monitor the cure of an epoxy sample as well as post-cure temperature cycling to probe the mechanical properties and glass transition temperature of polymers. The hyperspectral imaging mode is used to analyze a multicomponent sample which is representative of a material with multiple degrees of cure. The primary material which is investigated is a bisphenol A diglycidyl ether (DGEBA)-based epoxy cured with various curing agents.",
    "This dataset accompanies a publication (S. Engmann et al. 2025 IEEE ECTC, doi: 10.1109/ECTC51687.2025.00288) which contains figures displaying this data."
  ],
  "keyword": [
    "Brillouin light scattering spectroscopy",
    "low-frequency Raman spectroscopy",
    "microscopy",
    "in situ",
    "kinetics",
    "mechanical properties",
    "packaging polymers"
  ],
  "topic": [
    {
      "@type": "Concept",
      "scheme": "https://data.nist.gov/od/dm/nist-themes/v1.1",
      "tag": "Materials: Polymers"
    },
    {
      "@type": "Concept",
      "tag": "Metrology:Optical, photometry, and laser metrology"
    },
    {
      "@type": "Concept",
      "scheme": "https://data.nist.gov/od/dm/nist-themes/v1.1",
      "tag": "Physics: Spectroscopy"
    },
    {
      "scheme": "https://data.nist.gov/od/dm/nist-themes-chipsmetrology/v1.0",
      "tag": "Advanced Packaging: Materials and Substrates",
      "@type": "Concept"
    },
    {
      "scheme": "https://data.nist.gov/od/dm/nist-themes-chipsmetrology/v1.0",
      "tag": "Metrology: Experimental Technique: Imaging",
      "@type": "Concept"
    },
    {
      "scheme": "https://data.nist.gov/od/dm/nist-themes-chipsmetrology/v1.0",
      "tag": "Metrology: Experimental Technique: Spectroscopy",
      "@type": "Concept"
    },
    {
      "scheme": "https://data.nist.gov/od/dm/nist-themes-chipsmetrology/v1.0",
      "tag": "Microelectronics: Component: Polymer",
      "@type": "Concept"
    },
    {
      "scheme": "https://data.nist.gov/od/dm/nist-themes-chipsmetrology/v1.0",
      "tag": "Metrology: Grand Challenge: 3-Enabling Metrology for Integrating Components in Advanced Packaging",
      "@type": "Concept"
    }
  ],
  "accessLevel": "public",
  "license": "https://www.nist.gov/open/license",
  "publisher": {
    "name": "National Institute of Standards and Technology",
    "@type": "org:Organization"
  },
  "language": [
    "en"
  ],
  "bureauCode": [
    "006:55"
  ],
  "programCode": [
    "006:052"
  ],
  "_editStatus": "done",
  "theme": [
    "Materials: Polymers",
    "Metrology:Optical, photometry, and laser metrology",
    "Physics: Spectroscopy"
  ],
  "components": [
    {
      "@id": "cmps/Fig9",
      "@type": [
        "nrdp:Subcollection"
      ],
      "_extensionSchemas": [
        "https://data.nist.gov/od/dm/nerdm-schema/pub/v0.7#/definitions/Subcollection"
      ],
      "filepath": "Fig9"
    },
    {
      "@id": "cmps/Fig9/Fig9a_wRegions.tif.sha256",
      "@type": [
        "nrdp:ChecksumFile",
        "nrdp:DownloadableFile",
        "dcat:Distribution"
      ],
      "filepath": "Fig9/Fig9a_wRegions.tif.sha256",
      "downloadURL": "https://data.nist.gov/od/ds/ark:/88434/mds2-3725/Fig9/Fig9a_wRegions.tif.sha256",
      "algorithm": {
        "tag": "sha256",
        "@type": "Thing"
      },
      "describes": "cmps/Fig9/Fig9a_wRegions.tif",
      "description": "SHA-256 checksum value for Fig9a_wRegions.tif",
      "_extensionSchemas": [
        "https://data.nist.gov/od/dm/nerdm-schema/pub/v0.7#/definitions/ChecksumFile"
      ],
      "mediaType": "text/plain"
    },
    {
      "@id": "cmps/Fig9/Fig9b_image_yAxis.txt",
      "@type": [
        "nrdp:DataFile",
        "nrdp:DownloadableFile",
        "dcat:Distribution"
      ],
      "_extensionSchemas": [
        "https://data.nist.gov/od/dm/nerdm-schema/pub/v0.7#/definitions/DataFile"
      ],
      "filepath": "Fig9/Fig9b_image_yAxis.txt",
      "downloadURL": "https://data.nist.gov/od/ds/ark:/88434/mds2-3725/Fig9/Fig9b_image_yAxis.txt",
      "mediaType": "text/plain"
    },
    {
      "@id": "cmps/Fig9/Fig9bc_hyperSpectral_specAxis.txt",
      "@type": [
        "nrdp:DataFile",
        "nrdp:DownloadableFile",
        "dcat:Distribution"
      ],
      "_extensionSchemas": [
        "https://data.nist.gov/od/dm/nerdm-schema/pub/v0.7#/definitions/DataFile"
      ],
      "filepath": "Fig9/Fig9bc_hyperSpectral_specAxis.txt",
      "downloadURL": "https://data.nist.gov/od/ds/ark:/88434/mds2-3725/Fig9/Fig9bc_hyperSpectral_specAxis.txt",
      "mediaType": "text/plain"
    },
    {
      "@id": "cmps/Fig9/Fig9b_image_BLSShiftData.txt",
      "@type": [
        "nrdp:DataFile",
        "nrdp:DownloadableFile",
        "dcat:Distribution"
      ],
      "_extensionSchemas": [
        "https://data.nist.gov/od/dm/nerdm-schema/pub/v0.7#/definitions/DataFile"
      ],
      "filepath": "Fig9/Fig9b_image_BLSShiftData.txt",
      "downloadURL": "https://data.nist.gov/od/ds/ark:/88434/mds2-3725/Fig9/Fig9b_image_BLSShiftData.txt",
      "mediaType": "text/plain"
    },
    {
      "@id": "cmps/Fig9/Fig9a.tif",
      "@type": [
        "nrdp:DataFile",
        "nrdp:DownloadableFile",
        "dcat:Distribution"
      ],
      "_extensionSchemas": [
        "https://data.nist.gov/od/dm/nerdm-schema/pub/v0.7#/definitions/DataFile"
      ],
      "filepath": "Fig9/Fig9a.tif",
      "downloadURL": "https://data.nist.gov/od/ds/ark:/88434/mds2-3725/Fig9/Fig9a.tif",
      "mediaType": "image/tiff"
    },
    {
      "@id": "cmps/Fig9/Fig9c_image_xAxis.txt.sha256",
      "@type": [
        "nrdp:ChecksumFile",
        "nrdp:DownloadableFile",
        "dcat:Distribution"
      ],
      "filepath": "Fig9/Fig9c_image_xAxis.txt.sha256",
      "downloadURL": "https://data.nist.gov/od/ds/ark:/88434/mds2-3725/Fig9/Fig9c_image_xAxis.txt.sha256",
      "algorithm": {
        "tag": "sha256",
        "@type": "Thing"
      },
      "describes": "cmps/Fig9/Fig9c_image_xAxis.txt",
      "description": "SHA-256 checksum value for Fig9c_image_xAxis.txt",
      "_extensionSchemas": [
        "https://data.nist.gov/od/dm/nerdm-schema/pub/v0.7#/definitions/ChecksumFile"
      ],
      "mediaType": "text/plain"
    },
    {
      "@id": "cmps/Fig9/Fig9b_image_xAxis.txt.sha256",
      "@type": [
        "nrdp:ChecksumFile",
        "nrdp:DownloadableFile",
        "dcat:Distribution"
      ],
      "filepath": "Fig9/Fig9b_image_xAxis.txt.sha256",
      "downloadURL": "https://data.nist.gov/od/ds/ark:/88434/mds2-3725/Fig9/Fig9b_image_xAxis.txt.sha256",
      "algorithm": {
        "tag": "sha256",
        "@type": "Thing"
      },
      "describes": "cmps/Fig9/Fig9b_image_xAxis.txt",
      "description": "SHA-256 checksum value for Fig9b_image_xAxis.txt",
      "_extensionSchemas": [
        "https://data.nist.gov/od/dm/nerdm-schema/pub/v0.7#/definitions/ChecksumFile"
      ],
      "mediaType": "text/plain"
    },
    {
      "@id": "cmps/Fig9/Fig9bc_hyperSpectral_data.txt.sha256",
      "@type": [
        "nrdp:ChecksumFile",
        "nrdp:DownloadableFile",
        "dcat:Distribution"
      ],
      "filepath": "Fig9/Fig9bc_hyperSpectral_data.txt.sha256",
      "downloadURL": "https://data.nist.gov/od/ds/ark:/88434/mds2-3725/Fig9/Fig9bc_hyperSpectral_data.txt.sha256",
      "algorithm": {
        "tag": "sha256",
        "@type": "Thing"
      },
      "describes": "cmps/Fig9/Fig9bc_hyperSpectral_data.txt",
      "description": "SHA-256 checksum value for Fig9bc_hyperSpectral_data.txt",
      "_extensionSchemas": [
        "https://data.nist.gov/od/dm/nerdm-schema/pub/v0.7#/definitions/ChecksumFile"
      ],
      "mediaType": "text/plain"
    },
    {
      "@id": "cmps/Fig9/Fig9a.tif.sha256",
      "@type": [
        "nrdp:ChecksumFile",
        "nrdp:DownloadableFile",
        "dcat:Distribution"
      ],
      "filepath": "Fig9/Fig9a.tif.sha256",
      "downloadURL": "https://data.nist.gov/od/ds/ark:/88434/mds2-3725/Fig9/Fig9a.tif.sha256",
      "algorithm": {
        "tag": "sha256",
        "@type": "Thing"
      },
      "describes": "cmps/Fig9/Fig9a.tif",
      "description": "SHA-256 checksum value for Fig9a.tif",
      "_extensionSchemas": [
        "https://data.nist.gov/od/dm/nerdm-schema/pub/v0.7#/definitions/ChecksumFile"
      ],
      "mediaType": "text/plain"
    },
    {
      "@id": "cmps/Fig9/Fig9d_hyperSpectral_specAxis.txt.sha256",
      "@type": [
        "nrdp:ChecksumFile",
        "nrdp:DownloadableFile",
        "dcat:Distribution"
      ],
      "filepath": "Fig9/Fig9d_hyperSpectral_specAxis.txt.sha256",
      "downloadURL": "https://data.nist.gov/od/ds/ark:/88434/mds2-3725/Fig9/Fig9d_hyperSpectral_specAxis.txt.sha256",
      "algorithm": {
        "tag": "sha256",
        "@type": "Thing"
      },
      "describes": "cmps/Fig9/Fig9d_hyperSpectral_specAxis.txt",
      "description": "SHA-256 checksum value for Fig9d_hyperSpectral_specAxis.txt",
      "_extensionSchemas": [
        "https://data.nist.gov/od/dm/nerdm-schema/pub/v0.7#/definitions/ChecksumFile"
      ],
      "mediaType": "text/plain"
    },
    {
      "@id": "cmps/Fig9/Fig9d_image_xAxis.txt.sha256",
      "@type": [
        "nrdp:ChecksumFile",
        "nrdp:DownloadableFile",
        "dcat:Distribution"
      ],
      "filepath": "Fig9/Fig9d_image_xAxis.txt.sha256",
      "downloadURL": "https://data.nist.gov/od/ds/ark:/88434/mds2-3725/Fig9/Fig9d_image_xAxis.txt.sha256",
      "algorithm": {
        "tag": "sha256",
        "@type": "Thing"
      },
      "describes": "cmps/Fig9/Fig9d_image_xAxis.txt",
      "description": "SHA-256 checksum value for Fig9d_image_xAxis.txt",
      "_extensionSchemas": [
        "https://data.nist.gov/od/dm/nerdm-schema/pub/v0.7#/definitions/ChecksumFile"
      ],
      "mediaType": "text/plain"
    },
    {
      "@id": "cmps/Fig9/Fig9d_image_yAxis.txt.sha256",
      "@type": [
        "nrdp:ChecksumFile",
        "nrdp:DownloadableFile",
        "dcat:Distribution"
      ],
      "filepath": "Fig9/Fig9d_image_yAxis.txt.sha256",
      "downloadURL": "https://data.nist.gov/od/ds/ark:/88434/mds2-3725/Fig9/Fig9d_image_yAxis.txt.sha256",
      "algorithm": {
        "tag": "sha256",
        "@type": "Thing"
      },
      "describes": "cmps/Fig9/Fig9d_image_yAxis.txt",
      "description": "SHA-256 checksum value for Fig9d_image_yAxis.txt",
      "_extensionSchemas": [
        "https://data.nist.gov/od/dm/nerdm-schema/pub/v0.7#/definitions/ChecksumFile"
      ],
      "mediaType": "text/plain"
    },
    {
      "@id": "cmps/Fig9/Fig9c_image_xAxis.txt",
      "@type": [
        "nrdp:DataFile",
        "nrdp:DownloadableFile",
        "dcat:Distribution"
      ],
      "_extensionSchemas": [
        "https://data.nist.gov/od/dm/nerdm-schema/pub/v0.7#/definitions/DataFile"
      ],
      "filepath": "Fig9/Fig9c_image_xAxis.txt",
      "downloadURL": "https://data.nist.gov/od/ds/ark:/88434/mds2-3725/Fig9/Fig9c_image_xAxis.txt",
      "mediaType": "text/plain"
    },
    {
      "@id": "cmps/Fig9/Fig9bc_hyperSpectral_specAxis.txt.sha256",
      "@type": [
        "nrdp:ChecksumFile",
        "nrdp:DownloadableFile",
        "dcat:Distribution"
      ],
      "filepath": "Fig9/Fig9bc_hyperSpectral_specAxis.txt.sha256",
      "downloadURL": "https://data.nist.gov/od/ds/ark:/88434/mds2-3725/Fig9/Fig9bc_hyperSpectral_specAxis.txt.sha256",
      "algorithm": {
        "tag": "sha256",
        "@type": "Thing"
      },
      "describes": "cmps/Fig9/Fig9bc_hyperSpectral_specAxis.txt",
      "description": "SHA-256 checksum value for Fig9bc_hyperSpectral_specAxis.txt",
      "_extensionSchemas": [
        "https://data.nist.gov/od/dm/nerdm-schema/pub/v0.7#/definitions/ChecksumFile"
      ],
      "mediaType": "text/plain"
    },
    {
      "@id": "cmps/Fig9/Fig9b_image_yAxis.txt.sha256",
      "@type": [
        "nrdp:ChecksumFile",
        "nrdp:DownloadableFile",
        "dcat:Distribution"
      ],
      "filepath": "Fig9/Fig9b_image_yAxis.txt.sha256",
      "downloadURL": "https://data.nist.gov/od/ds/ark:/88434/mds2-3725/Fig9/Fig9b_image_yAxis.txt.sha256",
      "algorithm": {
        "tag": "sha256",
        "@type": "Thing"
      },
      "describes": "cmps/Fig9/Fig9b_image_yAxis.txt",
      "description": "SHA-256 checksum value for Fig9b_image_yAxis.txt",
      "_extensionSchemas": [
        "https://data.nist.gov/od/dm/nerdm-schema/pub/v0.7#/definitions/ChecksumFile"
      ],
      "mediaType": "text/plain"
    },
    {
      "@id": "cmps/Fig9/Fig9d_hyperSpectral_data.txt.sha256",
      "@type": [
        "nrdp:ChecksumFile",
        "nrdp:DownloadableFile",
        "dcat:Distribution"
      ],
      "filepath": "Fig9/Fig9d_hyperSpectral_data.txt.sha256",
      "downloadURL": "https://data.nist.gov/od/ds/ark:/88434/mds2-3725/Fig9/Fig9d_hyperSpectral_data.txt.sha256",
      "algorithm": {
        "tag": "sha256",
        "@type": "Thing"
      },
      "describes": "cmps/Fig9/Fig9d_hyperSpectral_data.txt",
      "description": "SHA-256 checksum value for Fig9d_hyperSpectral_data.txt",
      "_extensionSchemas": [
        "https://data.nist.gov/od/dm/nerdm-schema/pub/v0.7#/definitions/ChecksumFile"
      ],
      "mediaType": "text/plain"
    },
    {
      "@id": "cmps/Fig9/Fig9bc_hyperSpectral_data.txt",
      "@type": [
        "nrdp:DataFile",
        "nrdp:DownloadableFile",
        "dcat:Distribution"
      ],
      "_extensionSchemas": [
        "https://data.nist.gov/od/dm/nerdm-schema/pub/v0.7#/definitions/DataFile"
      ],
      "filepath": "Fig9/Fig9bc_hyperSpectral_data.txt",
      "downloadURL": "https://data.nist.gov/od/ds/ark:/88434/mds2-3725/Fig9/Fig9bc_hyperSpectral_data.txt",
      "mediaType": "text/plain"
    },
    {
      "@id": "cmps/Fig9/Fig9a_wRegions.tif",
      "@type": [
        "nrdp:DataFile",
        "nrdp:DownloadableFile",
        "dcat:Distribution"
      ],
      "_extensionSchemas": [
        "https://data.nist.gov/od/dm/nerdm-schema/pub/v0.7#/definitions/DataFile"
      ],
      "filepath": "Fig9/Fig9a_wRegions.tif",
      "downloadURL": "https://data.nist.gov/od/ds/ark:/88434/mds2-3725/Fig9/Fig9a_wRegions.tif",
      "mediaType": "image/tiff"
    },
    {
      "@id": "cmps/Fig9/Fig9c_image_FWHMData.txt",
      "@type": [
        "nrdp:DataFile",
        "nrdp:DownloadableFile",
        "dcat:Distribution"
      ],
      "_extensionSchemas": [
        "https://data.nist.gov/od/dm/nerdm-schema/pub/v0.7#/definitions/DataFile"
      ],
      "filepath": "Fig9/Fig9c_image_FWHMData.txt",
      "downloadURL": "https://data.nist.gov/od/ds/ark:/88434/mds2-3725/Fig9/Fig9c_image_FWHMData.txt",
      "mediaType": "text/plain"
    },
    {
      "@id": "cmps/Fig9/Fig9c_image_yAxis.txt",
      "@type": [
        "nrdp:DataFile",
        "nrdp:DownloadableFile",
        "dcat:Distribution"
      ],
      "_extensionSchemas": [
        "https://data.nist.gov/od/dm/nerdm-schema/pub/v0.7#/definitions/DataFile"
      ],
      "filepath": "Fig9/Fig9c_image_yAxis.txt",
      "downloadURL": "https://data.nist.gov/od/ds/ark:/88434/mds2-3725/Fig9/Fig9c_image_yAxis.txt",
      "mediaType": "text/plain"
    },
    {
      "@id": "cmps/Fig9/Fig9c_image_FWHMData.txt.sha256",
      "@type": [
        "nrdp:ChecksumFile",
        "nrdp:DownloadableFile",
        "dcat:Distribution"
      ],
      "filepath": "Fig9/Fig9c_image_FWHMData.txt.sha256",
      "downloadURL": "https://data.nist.gov/od/ds/ark:/88434/mds2-3725/Fig9/Fig9c_image_FWHMData.txt.sha256",
      "algorithm": {
        "tag": "sha256",
        "@type": "Thing"
      },
      "describes": "cmps/Fig9/Fig9c_image_FWHMData.txt",
      "description": "SHA-256 checksum value for Fig9c_image_FWHMData.txt",
      "_extensionSchemas": [
        "https://data.nist.gov/od/dm/nerdm-schema/pub/v0.7#/definitions/ChecksumFile"
      ],
      "mediaType": "text/plain"
    },
    {
      "@id": "cmps/Fig9/Fig9d_image_xAxis.txt",
      "@type": [
        "nrdp:DataFile",
        "nrdp:DownloadableFile",
        "dcat:Distribution"
      ],
      "_extensionSchemas": [
        "https://data.nist.gov/od/dm/nerdm-schema/pub/v0.7#/definitions/DataFile"
      ],
      "filepath": "Fig9/Fig9d_image_xAxis.txt",
      "downloadURL": "https://data.nist.gov/od/ds/ark:/88434/mds2-3725/Fig9/Fig9d_image_xAxis.txt",
      "mediaType": "text/plain"
    },
    {
      "@id": "cmps/Fig9/Fig9d_image_LFRData.txt.sha256",
      "@type": [
        "nrdp:ChecksumFile",
        "nrdp:DownloadableFile",
        "dcat:Distribution"
      ],
      "filepath": "Fig9/Fig9d_image_LFRData.txt.sha256",
      "downloadURL": "https://data.nist.gov/od/ds/ark:/88434/mds2-3725/Fig9/Fig9d_image_LFRData.txt.sha256",
      "algorithm": {
        "tag": "sha256",
        "@type": "Thing"
      },
      "describes": "cmps/Fig9/Fig9d_image_LFRData.txt",
      "description": "SHA-256 checksum value for Fig9d_image_LFRData.txt",
      "_extensionSchemas": [
        "https://data.nist.gov/od/dm/nerdm-schema/pub/v0.7#/definitions/ChecksumFile"
      ],
      "mediaType": "text/plain"
    },
    {
      "@id": "cmps/Fig9/Fig9d_hyperSpectral_specAxis.txt",
      "@type": [
        "nrdp:DataFile",
        "nrdp:DownloadableFile",
        "dcat:Distribution"
      ],
      "_extensionSchemas": [
        "https://data.nist.gov/od/dm/nerdm-schema/pub/v0.7#/definitions/DataFile"
      ],
      "filepath": "Fig9/Fig9d_hyperSpectral_specAxis.txt",
      "downloadURL": "https://data.nist.gov/od/ds/ark:/88434/mds2-3725/Fig9/Fig9d_hyperSpectral_specAxis.txt",
      "mediaType": "text/plain"
    },
    {
      "@id": "cmps/Fig9/Fig9d_image_yAxis.txt",
      "@type": [
        "nrdp:DataFile",
        "nrdp:DownloadableFile",
        "dcat:Distribution"
      ],
      "_extensionSchemas": [
        "https://data.nist.gov/od/dm/nerdm-schema/pub/v0.7#/definitions/DataFile"
      ],
      "filepath": "Fig9/Fig9d_image_yAxis.txt",
      "downloadURL": "https://data.nist.gov/od/ds/ark:/88434/mds2-3725/Fig9/Fig9d_image_yAxis.txt",
      "mediaType": "text/plain"
    },
    {
      "@id": "cmps/Fig9/Fig9b_image_xAxis.txt",
      "@type": [
        "nrdp:DataFile",
        "nrdp:DownloadableFile",
        "dcat:Distribution"
      ],
      "_extensionSchemas": [
        "https://data.nist.gov/od/dm/nerdm-schema/pub/v0.7#/definitions/DataFile"
      ],
      "filepath": "Fig9/Fig9b_image_xAxis.txt",
      "downloadURL": "https://data.nist.gov/od/ds/ark:/88434/mds2-3725/Fig9/Fig9b_image_xAxis.txt",
      "mediaType": "text/plain"
    },
    {
      "@id": "cmps/Fig9/Fig9d_hyperSpectral_data.txt",
      "@type": [
        "nrdp:DataFile",
        "nrdp:DownloadableFile",
        "dcat:Distribution"
      ],
      "_extensionSchemas": [
        "https://data.nist.gov/od/dm/nerdm-schema/pub/v0.7#/definitions/DataFile"
      ],
      "filepath": "Fig9/Fig9d_hyperSpectral_data.txt",
      "downloadURL": "https://data.nist.gov/od/ds/ark:/88434/mds2-3725/Fig9/Fig9d_hyperSpectral_data.txt",
      "mediaType": "text/plain"
    },
    {
      "@id": "cmps/Fig9/Fig9d_image_LFRData.txt",
      "@type": [
        "nrdp:DataFile",
        "nrdp:DownloadableFile",
        "dcat:Distribution"
      ],
      "_extensionSchemas": [
        "https://data.nist.gov/od/dm/nerdm-schema/pub/v0.7#/definitions/DataFile"
      ],
      "filepath": "Fig9/Fig9d_image_LFRData.txt",
      "downloadURL": "https://data.nist.gov/od/ds/ark:/88434/mds2-3725/Fig9/Fig9d_image_LFRData.txt",
      "mediaType": "text/plain"
    },
    {
      "@id": "cmps/Fig9/Fig9c_image_yAxis.txt.sha256",
      "@type": [
        "nrdp:ChecksumFile",
        "nrdp:DownloadableFile",
        "dcat:Distribution"
      ],
      "filepath": "Fig9/Fig9c_image_yAxis.txt.sha256",
      "downloadURL": "https://data.nist.gov/od/ds/ark:/88434/mds2-3725/Fig9/Fig9c_image_yAxis.txt.sha256",
      "algorithm": {
        "tag": "sha256",
        "@type": "Thing"
      },
      "describes": "cmps/Fig9/Fig9c_image_yAxis.txt",
      "description": "SHA-256 checksum value for Fig9c_image_yAxis.txt",
      "_extensionSchemas": [
        "https://data.nist.gov/od/dm/nerdm-schema/pub/v0.7#/definitions/ChecksumFile"
      ],
      "mediaType": "text/plain"
    },
    {
      "@id": "cmps/Fig9/Fig9b_image_BLSShiftData.txt.sha256",
      "@type": [
        "nrdp:ChecksumFile",
        "nrdp:DownloadableFile",
        "dcat:Distribution"
      ],
      "filepath": "Fig9/Fig9b_image_BLSShiftData.txt.sha256",
      "downloadURL": "https://data.nist.gov/od/ds/ark:/88434/mds2-3725/Fig9/Fig9b_image_BLSShiftData.txt.sha256",
      "algorithm": {
        "tag": "sha256",
        "@type": "Thing"
      },
      "describes": "cmps/Fig9/Fig9b_image_BLSShiftData.txt",
      "description": "SHA-256 checksum value for Fig9b_image_BLSShiftData.txt",
      "_extensionSchemas": [
        "https://data.nist.gov/od/dm/nerdm-schema/pub/v0.7#/definitions/ChecksumFile"
      ],
      "mediaType": "text/plain"
    },
    {
      "@id": "cmps/Fig6",
      "@type": [
        "nrdp:Subcollection"
      ],
      "_extensionSchemas": [
        "https://data.nist.gov/od/dm/nerdm-schema/pub/v0.7#/definitions/Subcollection"
      ],
      "filepath": "Fig6"
    },
    {
      "@id": "cmps/Fig6/Fig6a_temperaturePlot.txt.sha256",
      "@type": [
        "nrdp:ChecksumFile",
        "nrdp:DownloadableFile",
        "dcat:Distribution"
      ],
      "filepath": "Fig6/Fig6a_temperaturePlot.txt.sha256",
      "downloadURL": "https://data.nist.gov/od/ds/ark:/88434/mds2-3725/Fig6/Fig6a_temperaturePlot.txt.sha256",
      "algorithm": {
        "tag": "sha256",
        "@type": "Thing"
      },
      "describes": "cmps/Fig6/Fig6a_temperaturePlot.txt",
      "description": "SHA-256 checksum value for Fig6a_temperaturePlot.txt",
      "_extensionSchemas": [
        "https://data.nist.gov/od/dm/nerdm-schema/pub/v0.7#/definitions/ChecksumFile"
      ],
      "mediaType": "text/plain"
    },
    {
      "@id": "cmps/Fig6/Fig6a_image_xAxis.txt.sha256",
      "@type": [
        "nrdp:ChecksumFile",
        "nrdp:DownloadableFile",
        "dcat:Distribution"
      ],
      "filepath": "Fig6/Fig6a_image_xAxis.txt.sha256",
      "downloadURL": "https://data.nist.gov/od/ds/ark:/88434/mds2-3725/Fig6/Fig6a_image_xAxis.txt.sha256",
      "algorithm": {
        "tag": "sha256",
        "@type": "Thing"
      },
      "describes": "cmps/Fig6/Fig6a_image_xAxis.txt",
      "description": "SHA-256 checksum value for Fig6a_image_xAxis.txt",
      "_extensionSchemas": [
        "https://data.nist.gov/od/dm/nerdm-schema/pub/v0.7#/definitions/ChecksumFile"
      ],
      "mediaType": "text/plain"
    },
    {
      "@id": "cmps/Fig6/Fig6c_integratedBP.txt.sha256",
      "@type": [
        "nrdp:ChecksumFile",
        "nrdp:DownloadableFile",
        "dcat:Distribution"
      ],
      "filepath": "Fig6/Fig6c_integratedBP.txt.sha256",
      "downloadURL": "https://data.nist.gov/od/ds/ark:/88434/mds2-3725/Fig6/Fig6c_integratedBP.txt.sha256",
      "algorithm": {
        "tag": "sha256",
        "@type": "Thing"
      },
      "describes": "cmps/Fig6/Fig6c_integratedBP.txt",
      "description": "SHA-256 checksum value for Fig6c_integratedBP.txt",
      "_extensionSchemas": [
        "https://data.nist.gov/od/dm/nerdm-schema/pub/v0.7#/definitions/ChecksumFile"
      ],
      "mediaType": "text/plain"
    },
    {
      "@id": "cmps/Fig6/Fig6a_image_intensityData.txt",
      "@type": [
        "nrdp:DataFile",
        "nrdp:DownloadableFile",
        "dcat:Distribution"
      ],
      "_extensionSchemas": [
        "https://data.nist.gov/od/dm/nerdm-schema/pub/v0.7#/definitions/DataFile"
      ],
      "filepath": "Fig6/Fig6a_image_intensityData.txt",
      "downloadURL": "https://data.nist.gov/od/ds/ark:/88434/mds2-3725/Fig6/Fig6a_image_intensityData.txt",
      "mediaType": "text/plain"
    },
    {
      "@id": "cmps/Fig6/Fig6c_integratedBP.txt",
      "@type": [
        "nrdp:DataFile",
        "nrdp:DownloadableFile",
        "dcat:Distribution"
      ],
      "_extensionSchemas": [
        "https://data.nist.gov/od/dm/nerdm-schema/pub/v0.7#/definitions/DataFile"
      ],
      "filepath": "Fig6/Fig6c_integratedBP.txt",
      "downloadURL": "https://data.nist.gov/od/ds/ark:/88434/mds2-3725/Fig6/Fig6c_integratedBP.txt",
      "mediaType": "text/plain"
    },
    {
      "@id": "cmps/Fig6/Fig6b_spectra.txt.sha256",
      "@type": [
        "nrdp:ChecksumFile",
        "nrdp:DownloadableFile",
        "dcat:Distribution"
      ],
      "filepath": "Fig6/Fig6b_spectra.txt.sha256",
      "downloadURL": "https://data.nist.gov/od/ds/ark:/88434/mds2-3725/Fig6/Fig6b_spectra.txt.sha256",
      "algorithm": {
        "tag": "sha256",
        "@type": "Thing"
      },
      "describes": "cmps/Fig6/Fig6b_spectra.txt",
      "description": "SHA-256 checksum value for Fig6b_spectra.txt",
      "_extensionSchemas": [
        "https://data.nist.gov/od/dm/nerdm-schema/pub/v0.7#/definitions/ChecksumFile"
      ],
      "mediaType": "text/plain"
    },
    {
      "@id": "cmps/Fig6/Fig6a_image_xAxis.txt",
      "@type": [
        "nrdp:DataFile",
        "nrdp:DownloadableFile",
        "dcat:Distribution"
      ],
      "_extensionSchemas": [
        "https://data.nist.gov/od/dm/nerdm-schema/pub/v0.7#/definitions/DataFile"
      ],
      "filepath": "Fig6/Fig6a_image_xAxis.txt",
      "downloadURL": "https://data.nist.gov/od/ds/ark:/88434/mds2-3725/Fig6/Fig6a_image_xAxis.txt",
      "mediaType": "text/plain"
    },
    {
      "@id": "cmps/Fig6/Fig6a_image_intensityData.txt.sha256",
      "@type": [
        "nrdp:ChecksumFile",
        "nrdp:DownloadableFile",
        "dcat:Distribution"
      ],
      "filepath": "Fig6/Fig6a_image_intensityData.txt.sha256",
      "downloadURL": "https://data.nist.gov/od/ds/ark:/88434/mds2-3725/Fig6/Fig6a_image_intensityData.txt.sha256",
      "algorithm": {
        "tag": "sha256",
        "@type": "Thing"
      },
      "describes": "cmps/Fig6/Fig6a_image_intensityData.txt",
      "description": "SHA-256 checksum value for Fig6a_image_intensityData.txt",
      "_extensionSchemas": [
        "https://data.nist.gov/od/dm/nerdm-schema/pub/v0.7#/definitions/ChecksumFile"
      ],
      "mediaType": "text/plain"
    },
    {
      "@id": "cmps/Fig6/Fig6a_image_timeAxis.txt",
      "@type": [
        "nrdp:DataFile",
        "nrdp:DownloadableFile",
        "dcat:Distribution"
      ],
      "_extensionSchemas": [
        "https://data.nist.gov/od/dm/nerdm-schema/pub/v0.7#/definitions/DataFile"
      ],
      "filepath": "Fig6/Fig6a_image_timeAxis.txt",
      "downloadURL": "https://data.nist.gov/od/ds/ark:/88434/mds2-3725/Fig6/Fig6a_image_timeAxis.txt",
      "mediaType": "text/plain"
    },
    {
      "@id": "cmps/Fig6/Fig6c_Temperature.txt",
      "@type": [
        "nrdp:DataFile",
        "nrdp:DownloadableFile",
        "dcat:Distribution"
      ],
      "_extensionSchemas": [
        "https://data.nist.gov/od/dm/nerdm-schema/pub/v0.7#/definitions/DataFile"
      ],
      "filepath": "Fig6/Fig6c_Temperature.txt",
      "downloadURL": "https://data.nist.gov/od/ds/ark:/88434/mds2-3725/Fig6/Fig6c_Temperature.txt",
      "mediaType": "text/plain"
    },
    {
      "@id": "cmps/Fig6/Fig6c_Temperature.txt.sha256",
      "@type": [
        "nrdp:ChecksumFile",
        "nrdp:DownloadableFile",
        "dcat:Distribution"
      ],
      "filepath": "Fig6/Fig6c_Temperature.txt.sha256",
      "downloadURL": "https://data.nist.gov/od/ds/ark:/88434/mds2-3725/Fig6/Fig6c_Temperature.txt.sha256",
      "algorithm": {
        "tag": "sha256",
        "@type": "Thing"
      },
      "describes": "cmps/Fig6/Fig6c_Temperature.txt",
      "description": "SHA-256 checksum value for Fig6c_Temperature.txt",
      "_extensionSchemas": [
        "https://data.nist.gov/od/dm/nerdm-schema/pub/v0.7#/definitions/ChecksumFile"
      ],
      "mediaType": "text/plain"
    },
    {
      "@id": "cmps/Fig6/Fig6b_spectra.txt",
      "@type": [
        "nrdp:DataFile",
        "nrdp:DownloadableFile",
        "dcat:Distribution"
      ],
      "_extensionSchemas": [
        "https://data.nist.gov/od/dm/nerdm-schema/pub/v0.7#/definitions/DataFile"
      ],
      "filepath": "Fig6/Fig6b_spectra.txt",
      "downloadURL": "https://data.nist.gov/od/ds/ark:/88434/mds2-3725/Fig6/Fig6b_spectra.txt",
      "mediaType": "text/plain"
    },
    {
      "@id": "cmps/Fig6/Fig6a_image_timeAxis.txt.sha256",
      "@type": [
        "nrdp:ChecksumFile",
        "nrdp:DownloadableFile",
        "dcat:Distribution"
      ],
      "filepath": "Fig6/Fig6a_image_timeAxis.txt.sha256",
      "downloadURL": "https://data.nist.gov/od/ds/ark:/88434/mds2-3725/Fig6/Fig6a_image_timeAxis.txt.sha256",
      "algorithm": {
        "tag": "sha256",
        "@type": "Thing"
      },
      "describes": "cmps/Fig6/Fig6a_image_timeAxis.txt",
      "description": "SHA-256 checksum value for Fig6a_image_timeAxis.txt",
      "_extensionSchemas": [
        "https://data.nist.gov/od/dm/nerdm-schema/pub/v0.7#/definitions/ChecksumFile"
      ],
      "mediaType": "text/plain"
    },
    {
      "@id": "cmps/Fig6/Fig6a_temperaturePlot.txt",
      "@type": [
        "nrdp:DataFile",
        "nrdp:DownloadableFile",
        "dcat:Distribution"
      ],
      "_extensionSchemas": [
        "https://data.nist.gov/od/dm/nerdm-schema/pub/v0.7#/definitions/DataFile"
      ],
      "filepath": "Fig6/Fig6a_temperaturePlot.txt",
      "downloadURL": "https://data.nist.gov/od/ds/ark:/88434/mds2-3725/Fig6/Fig6a_temperaturePlot.txt",
      "mediaType": "text/plain"
    },
    {
      "@id": "cmps/Fig5",
      "@type": [
        "nrdp:Subcollection"
      ],
      "_extensionSchemas": [
        "https://data.nist.gov/od/dm/nerdm-schema/pub/v0.7#/definitions/Subcollection"
      ],
      "filepath": "Fig5"
    },
    {
      "@id": "cmps/Fig5/Fig5_data.txt.sha256",
      "@type": [
        "nrdp:ChecksumFile",
        "nrdp:DownloadableFile",
        "dcat:Distribution"
      ],
      "filepath": "Fig5/Fig5_data.txt.sha256",
      "downloadURL": "https://data.nist.gov/od/ds/ark:/88434/mds2-3725/Fig5/Fig5_data.txt.sha256",
      "algorithm": {
        "tag": "sha256",
        "@type": "Thing"
      },
      "describes": "cmps/Fig5/Fig5_data.txt",
      "description": "SHA-256 checksum value for Fig5_data.txt",
      "_extensionSchemas": [
        "https://data.nist.gov/od/dm/nerdm-schema/pub/v0.7#/definitions/ChecksumFile"
      ],
      "mediaType": "text/plain"
    },
    {
      "@id": "cmps/Fig5/Fig5_data.txt",
      "@type": [
        "nrdp:DataFile",
        "nrdp:DownloadableFile",
        "dcat:Distribution"
      ],
      "_extensionSchemas": [
        "https://data.nist.gov/od/dm/nerdm-schema/pub/v0.7#/definitions/DataFile"
      ],
      "filepath": "Fig5/Fig5_data.txt",
      "downloadURL": "https://data.nist.gov/od/ds/ark:/88434/mds2-3725/Fig5/Fig5_data.txt",
      "mediaType": "text/plain"
    },
    {
      "@id": "cmps/Fig7",
      "@type": [
        "nrdp:Subcollection"
      ],
      "_extensionSchemas": [
        "https://data.nist.gov/od/dm/nerdm-schema/pub/v0.7#/definitions/Subcollection"
      ],
      "filepath": "Fig7"
    },
    {
      "@id": "cmps/Fig7/Fig7a_image_xAxis.txt",
      "@type": [
        "nrdp:DataFile",
        "nrdp:DownloadableFile",
        "dcat:Distribution"
      ],
      "_extensionSchemas": [
        "https://data.nist.gov/od/dm/nerdm-schema/pub/v0.7#/definitions/DataFile"
      ],
      "filepath": "Fig7/Fig7a_image_xAxis.txt",
      "downloadURL": "https://data.nist.gov/od/ds/ark:/88434/mds2-3725/Fig7/Fig7a_image_xAxis.txt",
      "mediaType": "text/plain"
    },
    {
      "@id": "cmps/Fig7/Fig7a_image_intensityData.txt",
      "@type": [
        "nrdp:DataFile",
        "nrdp:DownloadableFile",
        "dcat:Distribution"
      ],
      "_extensionSchemas": [
        "https://data.nist.gov/od/dm/nerdm-schema/pub/v0.7#/definitions/DataFile"
      ],
      "filepath": "Fig7/Fig7a_image_intensityData.txt",
      "downloadURL": "https://data.nist.gov/od/ds/ark:/88434/mds2-3725/Fig7/Fig7a_image_intensityData.txt",
      "mediaType": "text/plain"
    },
    {
      "@id": "cmps/Fig7/Fig7a_temperaturePlot.txt.sha256",
      "@type": [
        "nrdp:ChecksumFile",
        "nrdp:DownloadableFile",
        "dcat:Distribution"
      ],
      "filepath": "Fig7/Fig7a_temperaturePlot.txt.sha256",
      "downloadURL": "https://data.nist.gov/od/ds/ark:/88434/mds2-3725/Fig7/Fig7a_temperaturePlot.txt.sha256",
      "algorithm": {
        "tag": "sha256",
        "@type": "Thing"
      },
      "describes": "cmps/Fig7/Fig7a_temperaturePlot.txt",
      "description": "SHA-256 checksum value for Fig7a_temperaturePlot.txt",
      "_extensionSchemas": [
        "https://data.nist.gov/od/dm/nerdm-schema/pub/v0.7#/definitions/ChecksumFile"
      ],
      "mediaType": "text/plain"
    },
    {
      "@id": "cmps/Fig7/Fig7a_image_intensityData.txt.sha256",
      "@type": [
        "nrdp:ChecksumFile",
        "nrdp:DownloadableFile",
        "dcat:Distribution"
      ],
      "filepath": "Fig7/Fig7a_image_intensityData.txt.sha256",
      "downloadURL": "https://data.nist.gov/od/ds/ark:/88434/mds2-3725/Fig7/Fig7a_image_intensityData.txt.sha256",
      "algorithm": {
        "tag": "sha256",
        "@type": "Thing"
      },
      "describes": "cmps/Fig7/Fig7a_image_intensityData.txt",
      "description": "SHA-256 checksum value for Fig7a_image_intensityData.txt",
      "_extensionSchemas": [
        "https://data.nist.gov/od/dm/nerdm-schema/pub/v0.7#/definitions/ChecksumFile"
      ],
      "mediaType": "text/plain"
    },
    {
      "@id": "cmps/Fig7/Fig7a_temperaturePlot.txt",
      "@type": [
        "nrdp:DataFile",
        "nrdp:DownloadableFile",
        "dcat:Distribution"
      ],
      "_extensionSchemas": [
        "https://data.nist.gov/od/dm/nerdm-schema/pub/v0.7#/definitions/DataFile"
      ],
      "filepath": "Fig7/Fig7a_temperaturePlot.txt",
      "downloadURL": "https://data.nist.gov/od/ds/ark:/88434/mds2-3725/Fig7/Fig7a_temperaturePlot.txt",
      "mediaType": "text/plain"
    },
    {
      "@id": "cmps/Fig7/Fig7a_image_timeAxis.txt.sha256",
      "@type": [
        "nrdp:ChecksumFile",
        "nrdp:DownloadableFile",
        "dcat:Distribution"
      ],
      "filepath": "Fig7/Fig7a_image_timeAxis.txt.sha256",
      "downloadURL": "https://data.nist.gov/od/ds/ark:/88434/mds2-3725/Fig7/Fig7a_image_timeAxis.txt.sha256",
      "algorithm": {
        "tag": "sha256",
        "@type": "Thing"
      },
      "describes": "cmps/Fig7/Fig7a_image_timeAxis.txt",
      "description": "SHA-256 checksum value for Fig7a_image_timeAxis.txt",
      "_extensionSchemas": [
        "https://data.nist.gov/od/dm/nerdm-schema/pub/v0.7#/definitions/ChecksumFile"
      ],
      "mediaType": "text/plain"
    },
    {
      "@id": "cmps/Fig7/Fig7a_image_timeAxis.txt",
      "@type": [
        "nrdp:DataFile",
        "nrdp:DownloadableFile",
        "dcat:Distribution"
      ],
      "_extensionSchemas": [
        "https://data.nist.gov/od/dm/nerdm-schema/pub/v0.7#/definitions/DataFile"
      ],
      "filepath": "Fig7/Fig7a_image_timeAxis.txt",
      "downloadURL": "https://data.nist.gov/od/ds/ark:/88434/mds2-3725/Fig7/Fig7a_image_timeAxis.txt",
      "mediaType": "text/plain"
    },
    {
      "@id": "cmps/Fig7/Fig7b_spectra.txt.sha256",
      "@type": [
        "nrdp:ChecksumFile",
        "nrdp:DownloadableFile",
        "dcat:Distribution"
      ],
      "filepath": "Fig7/Fig7b_spectra.txt.sha256",
      "downloadURL": "https://data.nist.gov/od/ds/ark:/88434/mds2-3725/Fig7/Fig7b_spectra.txt.sha256",
      "algorithm": {
        "tag": "sha256",
        "@type": "Thing"
      },
      "describes": "cmps/Fig7/Fig7b_spectra.txt",
      "description": "SHA-256 checksum value for Fig7b_spectra.txt",
      "_extensionSchemas": [
        "https://data.nist.gov/od/dm/nerdm-schema/pub/v0.7#/definitions/ChecksumFile"
      ],
      "mediaType": "text/plain"
    },
    {
      "@id": "cmps/Fig7/Fig7b_spectra.txt",
      "@type": [
        "nrdp:DataFile",
        "nrdp:DownloadableFile",
        "dcat:Distribution"
      ],
      "_extensionSchemas": [
        "https://data.nist.gov/od/dm/nerdm-schema/pub/v0.7#/definitions/DataFile"
      ],
      "filepath": "Fig7/Fig7b_spectra.txt",
      "downloadURL": "https://data.nist.gov/od/ds/ark:/88434/mds2-3725/Fig7/Fig7b_spectra.txt",
      "mediaType": "text/plain"
    },
    {
      "@id": "cmps/Fig7/Fig7a_image_xAxis.txt.sha256",
      "@type": [
        "nrdp:ChecksumFile",
        "nrdp:DownloadableFile",
        "dcat:Distribution"
      ],
      "filepath": "Fig7/Fig7a_image_xAxis.txt.sha256",
      "downloadURL": "https://data.nist.gov/od/ds/ark:/88434/mds2-3725/Fig7/Fig7a_image_xAxis.txt.sha256",
      "algorithm": {
        "tag": "sha256",
        "@type": "Thing"
      },
      "describes": "cmps/Fig7/Fig7a_image_xAxis.txt",
      "description": "SHA-256 checksum value for Fig7a_image_xAxis.txt",
      "_extensionSchemas": [
        "https://data.nist.gov/od/dm/nerdm-schema/pub/v0.7#/definitions/ChecksumFile"
      ],
      "mediaType": "text/plain"
    },
    {
      "@id": "cmps/Fig2",
      "@type": [
        "nrdp:Subcollection"
      ],
      "_extensionSchemas": [
        "https://data.nist.gov/od/dm/nerdm-schema/pub/v0.7#/definitions/Subcollection"
      ],
      "filepath": "Fig2"
    },
    {
      "@id": "cmps/Fig2/Fig2_data.txt.sha256",
      "@type": [
        "nrdp:ChecksumFile",
        "nrdp:DownloadableFile",
        "dcat:Distribution"
      ],
      "filepath": "Fig2/Fig2_data.txt.sha256",
      "downloadURL": "https://data.nist.gov/od/ds/ark:/88434/mds2-3725/Fig2/Fig2_data.txt.sha256",
      "algorithm": {
        "tag": "sha256",
        "@type": "Thing"
      },
      "describes": "cmps/Fig2/Fig2_data.txt",
      "description": "SHA-256 checksum value for Fig2_data.txt",
      "_extensionSchemas": [
        "https://data.nist.gov/od/dm/nerdm-schema/pub/v0.7#/definitions/ChecksumFile"
      ],
      "mediaType": "text/plain"
    },
    {
      "@id": "cmps/Fig2/Fig2_data.txt",
      "@type": [
        "nrdp:DataFile",
        "nrdp:DownloadableFile",
        "dcat:Distribution"
      ],
      "_extensionSchemas": [
        "https://data.nist.gov/od/dm/nerdm-schema/pub/v0.7#/definitions/DataFile"
      ],
      "filepath": "Fig2/Fig2_data.txt",
      "downloadURL": "https://data.nist.gov/od/ds/ark:/88434/mds2-3725/Fig2/Fig2_data.txt",
      "mediaType": "text/plain"
    },
    {
      "@id": "cmps/Fig4",
      "@type": [
        "nrdp:Subcollection"
      ],
      "_extensionSchemas": [
        "https://data.nist.gov/od/dm/nerdm-schema/pub/v0.7#/definitions/Subcollection"
      ],
      "filepath": "Fig4"
    },
    {
      "@id": "cmps/Fig4/Fig4a_temperaturePlot.txt",
      "@type": [
        "nrdp:DataFile",
        "nrdp:DownloadableFile",
        "dcat:Distribution"
      ],
      "_extensionSchemas": [
        "https://data.nist.gov/od/dm/nerdm-schema/pub/v0.7#/definitions/DataFile"
      ],
      "filepath": "Fig4/Fig4a_temperaturePlot.txt",
      "downloadURL": "https://data.nist.gov/od/ds/ark:/88434/mds2-3725/Fig4/Fig4a_temperaturePlot.txt",
      "mediaType": "text/plain"
    },
    {
      "@id": "cmps/Fig4/Fig4a_image_timeAxis.txt.sha256",
      "@type": [
        "nrdp:ChecksumFile",
        "nrdp:DownloadableFile",
        "dcat:Distribution"
      ],
      "filepath": "Fig4/Fig4a_image_timeAxis.txt.sha256",
      "downloadURL": "https://data.nist.gov/od/ds/ark:/88434/mds2-3725/Fig4/Fig4a_image_timeAxis.txt.sha256",
      "algorithm": {
        "tag": "sha256",
        "@type": "Thing"
      },
      "describes": "cmps/Fig4/Fig4a_image_timeAxis.txt",
      "description": "SHA-256 checksum value for Fig4a_image_timeAxis.txt",
      "_extensionSchemas": [
        "https://data.nist.gov/od/dm/nerdm-schema/pub/v0.7#/definitions/ChecksumFile"
      ],
      "mediaType": "text/plain"
    },
    {
      "@id": "cmps/Fig4/Fig4b_spectra.txt.sha256",
      "@type": [
        "nrdp:ChecksumFile",
        "nrdp:DownloadableFile",
        "dcat:Distribution"
      ],
      "filepath": "Fig4/Fig4b_spectra.txt.sha256",
      "downloadURL": "https://data.nist.gov/od/ds/ark:/88434/mds2-3725/Fig4/Fig4b_spectra.txt.sha256",
      "algorithm": {
        "tag": "sha256",
        "@type": "Thing"
      },
      "describes": "cmps/Fig4/Fig4b_spectra.txt",
      "description": "SHA-256 checksum value for Fig4b_spectra.txt",
      "_extensionSchemas": [
        "https://data.nist.gov/od/dm/nerdm-schema/pub/v0.7#/definitions/ChecksumFile"
      ],
      "mediaType": "text/plain"
    },
    {
      "@id": "cmps/Fig4/Fig4a_image_intensityData.txt",
      "@type": [
        "nrdp:DataFile",
        "nrdp:DownloadableFile",
        "dcat:Distribution"
      ],
      "_extensionSchemas": [
        "https://data.nist.gov/od/dm/nerdm-schema/pub/v0.7#/definitions/DataFile"
      ],
      "filepath": "Fig4/Fig4a_image_intensityData.txt",
      "downloadURL": "https://data.nist.gov/od/ds/ark:/88434/mds2-3725/Fig4/Fig4a_image_intensityData.txt",
      "mediaType": "text/plain"
    },
    {
      "@id": "cmps/Fig4/Fig4b_spectra.txt",
      "@type": [
        "nrdp:DataFile",
        "nrdp:DownloadableFile",
        "dcat:Distribution"
      ],
      "_extensionSchemas": [
        "https://data.nist.gov/od/dm/nerdm-schema/pub/v0.7#/definitions/DataFile"
      ],
      "filepath": "Fig4/Fig4b_spectra.txt",
      "downloadURL": "https://data.nist.gov/od/ds/ark:/88434/mds2-3725/Fig4/Fig4b_spectra.txt",
      "mediaType": "text/plain"
    },
    {
      "@id": "cmps/Fig4/Fig4a_temperaturePlot.txt.sha256",
      "@type": [
        "nrdp:ChecksumFile",
        "nrdp:DownloadableFile",
        "dcat:Distribution"
      ],
      "filepath": "Fig4/Fig4a_temperaturePlot.txt.sha256",
      "downloadURL": "https://data.nist.gov/od/ds/ark:/88434/mds2-3725/Fig4/Fig4a_temperaturePlot.txt.sha256",
      "algorithm": {
        "tag": "sha256",
        "@type": "Thing"
      },
      "describes": "cmps/Fig4/Fig4a_temperaturePlot.txt",
      "description": "SHA-256 checksum value for Fig4a_temperaturePlot.txt",
      "_extensionSchemas": [
        "https://data.nist.gov/od/dm/nerdm-schema/pub/v0.7#/definitions/ChecksumFile"
      ],
      "mediaType": "text/plain"
    },
    {
      "@id": "cmps/Fig4/Fig4a_image_xAxis.txt",
      "@type": [
        "nrdp:DataFile",
        "nrdp:DownloadableFile",
        "dcat:Distribution"
      ],
      "_extensionSchemas": [
        "https://data.nist.gov/od/dm/nerdm-schema/pub/v0.7#/definitions/DataFile"
      ],
      "filepath": "Fig4/Fig4a_image_xAxis.txt",
      "downloadURL": "https://data.nist.gov/od/ds/ark:/88434/mds2-3725/Fig4/Fig4a_image_xAxis.txt",
      "mediaType": "text/plain"
    },
    {
      "@id": "cmps/Fig4/Fig4a_image_intensityData.txt.sha256",
      "@type": [
        "nrdp:ChecksumFile",
        "nrdp:DownloadableFile",
        "dcat:Distribution"
      ],
      "filepath": "Fig4/Fig4a_image_intensityData.txt.sha256",
      "downloadURL": "https://data.nist.gov/od/ds/ark:/88434/mds2-3725/Fig4/Fig4a_image_intensityData.txt.sha256",
      "algorithm": {
        "tag": "sha256",
        "@type": "Thing"
      },
      "describes": "cmps/Fig4/Fig4a_image_intensityData.txt",
      "description": "SHA-256 checksum value for Fig4a_image_intensityData.txt",
      "_extensionSchemas": [
        "https://data.nist.gov/od/dm/nerdm-schema/pub/v0.7#/definitions/ChecksumFile"
      ],
      "mediaType": "text/plain"
    },
    {
      "@id": "cmps/Fig4/Fig4a_image_xAxis.txt.sha256",
      "@type": [
        "nrdp:ChecksumFile",
        "nrdp:DownloadableFile",
        "dcat:Distribution"
      ],
      "filepath": "Fig4/Fig4a_image_xAxis.txt.sha256",
      "downloadURL": "https://data.nist.gov/od/ds/ark:/88434/mds2-3725/Fig4/Fig4a_image_xAxis.txt.sha256",
      "algorithm": {
        "tag": "sha256",
        "@type": "Thing"
      },
      "describes": "cmps/Fig4/Fig4a_image_xAxis.txt",
      "description": "SHA-256 checksum value for Fig4a_image_xAxis.txt",
      "_extensionSchemas": [
        "https://data.nist.gov/od/dm/nerdm-schema/pub/v0.7#/definitions/ChecksumFile"
      ],
      "mediaType": "text/plain"
    },
    {
      "@id": "cmps/Fig4/Fig4a_image_timeAxis.txt",
      "@type": [
        "nrdp:DataFile",
        "nrdp:DownloadableFile",
        "dcat:Distribution"
      ],
      "_extensionSchemas": [
        "https://data.nist.gov/od/dm/nerdm-schema/pub/v0.7#/definitions/DataFile"
      ],
      "filepath": "Fig4/Fig4a_image_timeAxis.txt",
      "downloadURL": "https://data.nist.gov/od/ds/ark:/88434/mds2-3725/Fig4/Fig4a_image_timeAxis.txt",
      "mediaType": "text/plain"
    },
    {
      "@id": "cmps/ReadMe_20260427.txt",
      "@type": [
        "nrdp:DataFile",
        "nrdp:DownloadableFile",
        "dcat:Distribution"
      ],
      "_extensionSchemas": [
        "https://data.nist.gov/od/dm/nerdm-schema/pub/v0.7#/definitions/DataFile"
      ],
      "filepath": "ReadMe_20260427.txt",
      "downloadURL": "https://data.nist.gov/od/ds/mds2-3725/ReadMe_20260427.txt",
      "mediaType": "text/plain",
      "title": "ReadMe_20260427.txt",
      "size": 16132,
      "checksum": {
        "hash": "0790efe1cd8f52bd29492693a6e9ec52094c8757bafbc6b11703a4199bed36b6",
        "algorithm": {
          "tag": "sha256",
          "@type": "Thing"
        }
      }
    },
    {
      "@id": "cmps/Fig8",
      "@type": [
        "nrdp:Subcollection"
      ],
      "_extensionSchemas": [
        "https://data.nist.gov/od/dm/nerdm-schema/pub/v0.7#/definitions/Subcollection"
      ],
      "filepath": "Fig8"
    },
    {
      "@id": "cmps/Fig8/Fig8_data.txt",
      "@type": [
        "nrdp:DataFile",
        "nrdp:DownloadableFile",
        "dcat:Distribution"
      ],
      "_extensionSchemas": [
        "https://data.nist.gov/od/dm/nerdm-schema/pub/v0.7#/definitions/DataFile"
      ],
      "filepath": "Fig8/Fig8_data.txt",
      "downloadURL": "https://data.nist.gov/od/ds/ark:/88434/mds2-3725/Fig8/Fig8_data.txt",
      "mediaType": "text/plain"
    },
    {
      "@id": "cmps/Fig8/Fig8_data.txt.sha256",
      "@type": [
        "nrdp:ChecksumFile",
        "nrdp:DownloadableFile",
        "dcat:Distribution"
      ],
      "filepath": "Fig8/Fig8_data.txt.sha256",
      "downloadURL": "https://data.nist.gov/od/ds/ark:/88434/mds2-3725/Fig8/Fig8_data.txt.sha256",
      "algorithm": {
        "tag": "sha256",
        "@type": "Thing"
      },
      "describes": "cmps/Fig8/Fig8_data.txt",
      "description": "SHA-256 checksum value for Fig8_data.txt",
      "_extensionSchemas": [
        "https://data.nist.gov/od/dm/nerdm-schema/pub/v0.7#/definitions/ChecksumFile"
      ],
      "mediaType": "text/plain"
    }
  ],
  "authors": [
    {
      "familyName": "Engmann",
      "fn": "Sebastian  Engmann",
      "givenName": "Sebastian",
      "middleName": "",
      "affiliation": [
        {
          "title": "National Institute of Standards and Technology",
          "@type": "org:Organization",
          "@id": "ror:05xpvk416"
        },
        {
          "title": "Theiss",
          "@type": "org:Organization"
        }
      ],
      "orcid": "0000-0001-8791-3432",
      "@type": "foaf:Person"
    },
    {
      "familyName": "Gayle",
      "fn": "Andrew J. Gayle",
      "givenName": "Andrew",
      "middleName": "J.",
      "affiliation": [
        {
          "title": "National Institute of Standards and Technology",
          "@type": "org:Organization",
          "@id": "ror:05xpvk416"
        }
      ],
      "orcid": "0000-0003-4802-2439",
      "@type": "foaf:Person"
    },
    {
      "familyName": "Romberg",
      "fn": "Stian K. Romberg",
      "givenName": "Stian",
      "middleName": "K.",
      "affiliation": [
        {
          "title": "National Institute of Standards and Technology",
          "@type": "org:Organization",
          "@id": "ror:05xpvk416"
        }
      ],
      "orcid": "0000-0003-1026-2023",
      "@type": "foaf:Person"
    },
    {
      "familyName": "Soles",
      "fn": "Christopher L. Soles",
      "givenName": "Christopher",
      "middleName": "L.",
      "affiliation": [
        {
          "title": "National Institute of Standards and Technology",
          "@type": "org:Organization",
          "@id": "ror:05xpvk416"
        }
      ],
      "orcid": "0000-0002-1963-6039",
      "@type": "foaf:Person"
    },
    {
      "familyName": "Michaels",
      "fn": "Chris A. Michaels",
      "givenName": "Chris",
      "middleName": "A.",
      "affiliation": [
        {
          "title": "National Institute of Standards and Technology",
          "@type": "org:Organization",
          "@id": "ror:05xpvk416"
        }
      ],
      "orcid": "0000-0002-6562-4848",
      "@type": "foaf:Person"
    }
  ],
  "annotated": "2026-05-15T15:20:19.482117",
  "revised": "2026-04-27T19:25:54.432304",
  "issued": null,
  "firstIssued": "2025-05-15T20:46:59.166158",
  "releaseHistory": {
    "@id": "ark:/88434/mds2-3725/pdr:v",
    "@type": [
      "nrdr:ReleaseHistory"
    ],
    "hasRelease": [
      {
        "version": "1.0.0",
        "issued": "2025-02-27",
        "@id": "ark:/88434/mds2-3725/pdr:v/1.0.0",
        "location": "https://data.nist.gov/od/id/ark:/88434/mds2-3725/pdr:v/1.0.0",
        "description": "initial release"
      },
      {
        "version": "1.0.1",
        "issued": "2025-06-23",
        "@id": "ark:/88434/mds2-3725/pdr:v/1.0.1",
        "location": "https://data.nist.gov/od/id/ark:/88434/mds2-3725/pdr:v/1.0.1",
        "description": "curator: added to CHIPS Metrology collection"
      },
      {
        "version": "1.0.2",
        "issued": "2025-10-13",
        "@id": "ark:/88434/mds2-3725/pdr:v/1.0.2",
        "location": "https://data.nist.gov/od/id/ark:/88434/mds2-3725/pdr:v/1.0.2",
        "description": "curator: fix CHIPS Metrology topic typo"
      },
      {
        "version": "1.0.3",
        "issued": "2025-10-13",
        "@id": "ark:/88434/mds2-3725/pdr:v/1.0.3",
        "location": "https://data.nist.gov/od/id/ark:/88434/mds2-3725/pdr:v/1.0.3",
        "description": "add reference to published article"
      },
      {
        "version": "1.1.0",
        "issued": "2025-02-27 00:00:00",
        "@id": "ark:/88434/mds2-3725/pdr:v/1.1.0",
        "location": "https://data.nist.gov/od/id/ark:/88434/mds2-3725/pdr:v/1.1.0",
        "description": "data update"
      },
      {
        "version": "1.1.1",
        "issued": "2025-02-27 00:00:00",
        "@id": "ark:/88434/mds2-3725/pdr:v/1.1.1",
        "location": "https://data.nist.gov/od/id/ark:/88434/mds2-3725/pdr:v/1.1.1",
        "description": "metadata update"
      }
    ]
  },
  "isPartOf": [
    {
      "@type": [
        "nrda:ScienceTheme",
        "nrdp:PublicDataResource"
      ],
      "@id": "ark:/88434/pdr0-0002",
      "title": "CHIPS Metrology Data"
    }
  ],
  "references": [
    {
      "@type": [
        "npg:Document"
      ],
      "@id": "#ref:10.1109/ECTC51687.2025.00288",
      "refType": "IsSupplementTo",
      "location": "https://doi.org/10.1109/ECTC51687.2025.00288",
      "_extensionSchemas": [
        "https://data.nist.gov/od/dm/nerdm-schema/bib/v0.7#/definitions/DCiteReference"
      ],
      "title": "A Dual Mode Brillouin/Low-Frequency Raman Spectroscopy Microscope for Local Mechanical Property Imaging for Semiconductor Packaging Materials",
      "issued": "2025-05-27",
      "citation": "Engmann, S., Gayle, A. J., Romberg, S. K., Soles, C. L., & Michaels, C. A. (2025). A Dual Mode Brillouin/Low-Frequency Raman Spectroscopy Microscope for Local Mechanical Property Imaging for Semiconductor Packaging Materials. 2025 IEEE 75th Electronic Components and Technology Conference (ECTC), 1694\u00e2\u0080\u00931701. https://doi.org/10.1109/ectc51687.2025.00288\n"
    }
  ]
}