{
  "_schema": "https://data.nist.gov/od/dm/nerdm-schema/v0.7#",
  "@context": [
    "https://data.nist.gov/od/dm/nerdm-pub-context.jsonld",
    {
      "@base": "ark:/88434/mds2-3843"
    }
  ],
  "@type": [
    "nrdp:DataPublication",
    "nrdp:PublicDataResource",
    "dcat:Dataset"
  ],
  "_extensionSchemas": [
    "https://data.nist.gov/od/dm/nerdm-schema/pub/v0.7#/definitions/PublicDataResource"
  ],
  "@id": "ark:/88434/mds2-3843",
  "ediid": "ark:/88434/mds2-3843",
  "version": "1.0.1",
  "doi": "doi:10.18434/mds2-3843",
  "title": "Lab-based multi-wavelength EUV diffractometry for critical dimension metrology",
  "contactPoint": {
    "fn": "Bryan Barnes",
    "hasEmail": "mailto:bryan.barnes@nist.gov"
  },
  "modified": "2025-07-10",
  "status": "available",
  "landingPage": "https://data.nist.gov/od/id/mds2-3843",
  "description": [
    "This data set provides the measurement data from EUV diffractometry, simulated fits to these data, and parametric values and uncertainties from these fits as first reported in Barnes et al., \"Lab-based multi-wavelength EUV diffractometry for critical dimension metrology\", Proc. SPIE 134261V (2025).  These values and uncertainties for parametric geometries have been determined from these EUV diffractometry data using a tabletop coherent high- harmonic generation (HHG) source for four line-space arrays with CDs below 50 nm. An EUV imaging reflectometer has captured the 0th order reflection and the 1st order diffraction intensities as functions of grazing angle. The 1st order intensities are functions of five wavelengths from the spectral comb of this HHG source. Fits to these data using rigorous couple-wave analysis (RCWA) electromagnetic simulations yield parametric values and uncertainties. EUV diffractometry simulations match well in general with the measured data after accounting for cross-sectional geometry and experimental conditions."
  ],
  "keyword": [
    "extreme ultraviolet (EUV)",
    "EUV diffractometry",
    "EUV scatterometry"
  ],
  "topic": [
    {
      "@type": "Concept",
      "scheme": "https://data.nist.gov/od/dm/nist-themes/v1.1",
      "tag": "Metrology: Dimensional metrology"
    },
    {
      "@type": "Concept",
      "scheme": "https://data.nist.gov/od/dm/nist-themes/v1.1",
      "tag": "Nanotechnology: Nanometrology"
    },
    {
      "@type": "Concept",
      "scheme": "https://data.nist.gov/od/dm/nist-themes/v1.1",
      "tag": "Manufacturing: Process measurement and control"
    },
    {
      "scheme": "https://data.nist.gov/od/dm/nist-themes-chipsmetrology/v2.0",
      "tag": "Manufacturing: Processes: Inspection",
      "@type": "Concept"
    },
    {
      "scheme": "https://data.nist.gov/od/dm/nist-themes-chipsmetrology/v2.0",
      "tag": "Metrology: Experimental Technique: Diffraction and Scattering: X-ray",
      "@type": "Concept"
    },
    {
      "scheme": "https://data.nist.gov/od/dm/nist-themes-chipsmetrology/v2.0",
      "tag": "Metrology: Measurement: Dimensional",
      "@type": "Concept"
    },
    {
      "scheme": "https://data.nist.gov/od/dm/nist-themes-chipsmetrology/v2.0",
      "tag": "Metrology: Grand Challenge: 2-Advanced Metrology for Future Microelectronics Manufacturing",
      "@type": "Concept"
    }
  ],
  "accessLevel": "public",
  "license": "https://www.nist.gov/open/license",
  "publisher": {
    "name": "National Institute of Standards and Technology",
    "@type": "org:Organization"
  },
  "language": [
    "en"
  ],
  "bureauCode": [
    "006:55"
  ],
  "programCode": [
    "006:052"
  ],
  "_editStatus": "done",
  "theme": [
    "Metrology: Dimensional metrology",
    "Nanotechnology: Nanometrology",
    "Manufacturing: Process measurement and control"
  ],
  "references": [
    {
      "@type": [
        "npg:Document"
      ],
      "@id": "#ref:10.1117/12.3050342",
      "refType": "IsSupplementTo",
      "location": "https://doi.org/10.1117/12.3050342",
      "_extensionSchemas": [
        "https://data.nist.gov/od/dm/nerdm-schema/bib/v0.7#/definitions/DCiteReference"
      ],
      "title": "Lab-based multi-wavelength EUV diffractometry for critical dimension metrology",
      "issued": "2025-04-24",
      "citation": "Barnes, B. M., Chew, A., Jenkins, N. W., Shao, Y., Sohn, M. Y., Kline, R. J., Sunday, D. F., Balakrishnan, P. P., Germer, T. A., Grantham, S., Klein, C., Moffitt, S. L., Shirley, E. L., Kapteyn, H. C., & Murnane, M. M. (2025). Lab-based multi-wavelength EUV diffractometry for critical dimension metrology. Metrology, Inspection, and Process Control XXXIX, 63. https://doi.org/10.1117/12.3050342\n"
    }
  ],
  "components": [
    {
      "@id": "cmps/fit_x.npy",
      "@type": [
        "nrdp:DataFile",
        "nrdp:DownloadableFile",
        "dcat:Distribution"
      ],
      "_extensionSchemas": [
        "https://data.nist.gov/od/dm/nerdm-schema/pub/v0.7#/definitions/DataFile"
      ],
      "filepath": "fit_x.npy",
      "downloadURL": "https://data.nist.gov/od/ds/mds2-3843/fit_x.npy",
      "mediaType": "application/octet-stream",
      "title": "fit_x",
      "size": 416,
      "format": {
        "description": "numpy array"
      },
      "description": "A numpy array holding the final value of the fit.  This is fit.x, where fit is the output of scipy.optimize.least_squares.",
      "checksum": {
        "hash": "1cabe4c6114a5bd82f90b210f21b89e60720ebb46a466895296516d1762dcf67",
        "algorithm": {
          "tag": "sha256",
          "@type": "Thing"
        }
      }
    },
    {
      "@id": "cmps/optical_files",
      "@type": [
        "nrdp:Subcollection"
      ],
      "_extensionSchemas": [
        "https://data.nist.gov/od/dm/nerdm-schema/pub/v0.7#/definitions/Subcollection"
      ],
      "filepath": "optical_files"
    },
    {
      "@id": "cmps/optical_files/Silicon_interpolated_PALIK.txt",
      "@type": [
        "nrdp:DataFile",
        "nrdp:DownloadableFile",
        "dcat:Distribution"
      ],
      "_extensionSchemas": [
        "https://data.nist.gov/od/dm/nerdm-schema/pub/v0.7#/definitions/DataFile"
      ],
      "filepath": "optical_files/Silicon_interpolated_PALIK.txt",
      "downloadURL": "https://data.nist.gov/od/ds/mds2-3843/optical_files%2FSilicon_interpolated_PALIK.txt",
      "mediaType": "text/plain",
      "title": "optical_files/Silicon_interpolated_PALIK",
      "size": 21480,
      "checksum": {
        "hash": "eba1c16857b8c6d940bb6775be800fb731c9ac150b871854efb05e77add9ee5c",
        "algorithm": {
          "tag": "sha256",
          "@type": "Thing"
        }
      }
    },
    {
      "@id": "cmps/optical_files/SiO2_interpolated_PALIK.txt",
      "@type": [
        "nrdp:DataFile",
        "nrdp:DownloadableFile",
        "dcat:Distribution"
      ],
      "_extensionSchemas": [
        "https://data.nist.gov/od/dm/nerdm-schema/pub/v0.7#/definitions/DataFile"
      ],
      "filepath": "optical_files/SiO2_interpolated_PALIK.txt",
      "downloadURL": "https://data.nist.gov/od/ds/mds2-3843/optical_files%2FSiO2_interpolated_PALIK.txt",
      "mediaType": "text/plain",
      "title": "optical_files/SiO2_interpolated_PALIK",
      "size": 21369,
      "checksum": {
        "hash": "46d248e56e9f08ee747f042cd8829f5a2d6c0029c05a61c11895f862444d2d39",
        "algorithm": {
          "tag": "sha256",
          "@type": "Thing"
        }
      }
    },
    {
      "@id": "cmps/Analysis.ipynb",
      "@type": [
        "nrdp:DataFile",
        "nrdp:DownloadableFile",
        "dcat:Distribution"
      ],
      "_extensionSchemas": [
        "https://data.nist.gov/od/dm/nerdm-schema/pub/v0.7#/definitions/DataFile"
      ],
      "filepath": "Analysis.ipynb",
      "downloadURL": "https://data.nist.gov/od/ds/mds2-3843/Analysis.ipynb",
      "mediaType": "application/octet-stream",
      "size": 499337,
      "checksum": {
        "hash": "9ab58135f992dc259ddc905e399a7b7fd57d2a9afdb939c4e0295a532c4ac15c",
        "algorithm": {
          "tag": "sha256",
          "@type": "Thing"
        }
      },
      "format": {
        "description": "jupyter notebook"
      },
      "description": "A Python Jupyter notebook that contains the analysis of the data and can be used to generate all of the panels of Figure 6 shown in the paper and portions of Figure 7. Requires the scipy, numpy, and pySCATMECH libraries. ",
      "title": "Analysis"
    },
    {
      "@id": "cmps/FinalData",
      "@type": [
        "nrdp:Subcollection"
      ],
      "_extensionSchemas": [
        "https://data.nist.gov/od/dm/nerdm-schema/pub/v0.7#/definitions/Subcollection"
      ],
      "filepath": "FinalData"
    },
    {
      "@id": "cmps/FinalData/L55P110_full.csv",
      "@type": [
        "nrdp:DataFile",
        "nrdp:DownloadableFile",
        "dcat:Distribution"
      ],
      "_extensionSchemas": [
        "https://data.nist.gov/od/dm/nerdm-schema/pub/v0.7#/definitions/DataFile"
      ],
      "filepath": "FinalData/L55P110_full.csv",
      "downloadURL": "https://data.nist.gov/od/ds/ark:/88434/mds2-3843/FinalData/L55P110_full.csv",
      "mediaType": "text/csv",
      "size": 3699,
      "checksum": {
        "hash": "4143c8c217063c7288c7ff630ea5e7a161c8f1f434ca2662cb1e0c8aadbd33c5",
        "algorithm": {
          "tag": "sha256",
          "@type": "Thing"
        }
      }
    },
    {
      "@id": "cmps/FinalData/L50P100_full.csv.sha256",
      "@type": [
        "nrdp:ChecksumFile",
        "nrdp:DownloadableFile",
        "dcat:Distribution"
      ],
      "filepath": "FinalData/L50P100_full.csv.sha256",
      "downloadURL": "https://data.nist.gov/od/ds/ark:/88434/mds2-3843/FinalData/L50P100_full.csv.sha256",
      "algorithm": {
        "tag": "sha256",
        "@type": "Thing"
      },
      "describes": "cmps/FinalData/L50P100_full.csv",
      "description": "SHA-256 checksum value for L50P100_full.csv",
      "_extensionSchemas": [
        "https://data.nist.gov/od/dm/nerdm-schema/pub/v0.7#/definitions/ChecksumFile"
      ],
      "mediaType": "text/plain",
      "size": 64,
      "checksum": {
        "hash": "42be42478285b75b5f23905c499004d6f13b0a19abec10b2df8450d7efacd077",
        "algorithm": {
          "tag": "sha256",
          "@type": "Thing"
        }
      },
      "valid": true
    },
    {
      "@id": "cmps/FinalData/L52P104_full.csv.sha256",
      "@type": [
        "nrdp:ChecksumFile",
        "nrdp:DownloadableFile",
        "dcat:Distribution"
      ],
      "filepath": "FinalData/L52P104_full.csv.sha256",
      "downloadURL": "https://data.nist.gov/od/ds/ark:/88434/mds2-3843/FinalData/L52P104_full.csv.sha256",
      "algorithm": {
        "tag": "sha256",
        "@type": "Thing"
      },
      "describes": "cmps/FinalData/L52P104_full.csv",
      "description": "SHA-256 checksum value for L52P104_full.csv",
      "_extensionSchemas": [
        "https://data.nist.gov/od/dm/nerdm-schema/pub/v0.7#/definitions/ChecksumFile"
      ],
      "mediaType": "text/plain",
      "size": 64,
      "checksum": {
        "hash": "3ede0e60c44523fbf15d52e95ba2f6f136aaa0b810246985fd99a8b14790a028",
        "algorithm": {
          "tag": "sha256",
          "@type": "Thing"
        }
      },
      "valid": true
    },
    {
      "@id": "cmps/FinalData/L52P104_full.csv",
      "@type": [
        "nrdp:DataFile",
        "nrdp:DownloadableFile",
        "dcat:Distribution"
      ],
      "_extensionSchemas": [
        "https://data.nist.gov/od/dm/nerdm-schema/pub/v0.7#/definitions/DataFile"
      ],
      "filepath": "FinalData/L52P104_full.csv",
      "downloadURL": "https://data.nist.gov/od/ds/ark:/88434/mds2-3843/FinalData/L52P104_full.csv",
      "mediaType": "text/csv",
      "size": 3345,
      "checksum": {
        "hash": "369f82ae491e24314dc723633ad934730e7212aef1ab3fc1a8fc0597e2660bd3",
        "algorithm": {
          "tag": "sha256",
          "@type": "Thing"
        }
      }
    },
    {
      "@id": "cmps/FinalData/L57P114_full.csv",
      "@type": [
        "nrdp:DataFile",
        "nrdp:DownloadableFile",
        "dcat:Distribution"
      ],
      "_extensionSchemas": [
        "https://data.nist.gov/od/dm/nerdm-schema/pub/v0.7#/definitions/DataFile"
      ],
      "filepath": "FinalData/L57P114_full.csv",
      "downloadURL": "https://data.nist.gov/od/ds/ark:/88434/mds2-3843/FinalData/L57P114_full.csv",
      "mediaType": "text/csv",
      "size": 3692,
      "checksum": {
        "hash": "a87c5d3dbe71d72f6238c1d1a7fd3c4a23f5ccd558ad0a510116dec89192a239",
        "algorithm": {
          "tag": "sha256",
          "@type": "Thing"
        }
      }
    },
    {
      "@id": "cmps/FinalData/L57P114_full.csv.sha256",
      "@type": [
        "nrdp:ChecksumFile",
        "nrdp:DownloadableFile",
        "dcat:Distribution"
      ],
      "filepath": "FinalData/L57P114_full.csv.sha256",
      "downloadURL": "https://data.nist.gov/od/ds/ark:/88434/mds2-3843/FinalData/L57P114_full.csv.sha256",
      "algorithm": {
        "tag": "sha256",
        "@type": "Thing"
      },
      "describes": "cmps/FinalData/L57P114_full.csv",
      "description": "SHA-256 checksum value for L57P114_full.csv",
      "_extensionSchemas": [
        "https://data.nist.gov/od/dm/nerdm-schema/pub/v0.7#/definitions/ChecksumFile"
      ],
      "mediaType": "text/plain",
      "size": 64,
      "checksum": {
        "hash": "ea85c6941ebdb88e2f8be89ca2b3823fbb7a4031e69450a63c28802437a7441e",
        "algorithm": {
          "tag": "sha256",
          "@type": "Thing"
        }
      },
      "valid": true
    },
    {
      "@id": "cmps/FinalData/L50P100_full.csv",
      "@type": [
        "nrdp:DataFile",
        "nrdp:DownloadableFile",
        "dcat:Distribution"
      ],
      "_extensionSchemas": [
        "https://data.nist.gov/od/dm/nerdm-schema/pub/v0.7#/definitions/DataFile"
      ],
      "filepath": "FinalData/L50P100_full.csv",
      "downloadURL": "https://data.nist.gov/od/ds/ark:/88434/mds2-3843/FinalData/L50P100_full.csv",
      "mediaType": "text/csv",
      "size": 3323,
      "checksum": {
        "hash": "5f8fae1b54acfb2845ef7c1f15fd7a091fe25ffd2c3d67c780b35a81b1aa3e9c",
        "algorithm": {
          "tag": "sha256",
          "@type": "Thing"
        }
      }
    },
    {
      "@id": "cmps/FinalData/L55P110_full.csv.sha256",
      "@type": [
        "nrdp:ChecksumFile",
        "nrdp:DownloadableFile",
        "dcat:Distribution"
      ],
      "filepath": "FinalData/L55P110_full.csv.sha256",
      "downloadURL": "https://data.nist.gov/od/ds/ark:/88434/mds2-3843/FinalData/L55P110_full.csv.sha256",
      "algorithm": {
        "tag": "sha256",
        "@type": "Thing"
      },
      "describes": "cmps/FinalData/L55P110_full.csv",
      "description": "SHA-256 checksum value for L55P110_full.csv",
      "_extensionSchemas": [
        "https://data.nist.gov/od/dm/nerdm-schema/pub/v0.7#/definitions/ChecksumFile"
      ],
      "mediaType": "text/plain",
      "size": 64,
      "checksum": {
        "hash": "d4e072d3562d3aba89d4c7f9ae8a2933d152e269bb0da715cf5e6fdb110db8f2",
        "algorithm": {
          "tag": "sha256",
          "@type": "Thing"
        }
      },
      "valid": true
    },
    {
      "@id": "cmps/fit_jac.npy",
      "@type": [
        "nrdp:DataFile",
        "nrdp:DownloadableFile",
        "dcat:Distribution"
      ],
      "_extensionSchemas": [
        "https://data.nist.gov/od/dm/nerdm-schema/pub/v0.7#/definitions/DataFile"
      ],
      "filepath": "fit_jac.npy",
      "downloadURL": "https://data.nist.gov/od/ds/mds2-3843/fit_jac.npy",
      "mediaType": "application/octet-stream",
      "title": "fit_jac",
      "size": 195968,
      "format": {
        "description": "numpy array"
      },
      "description": "A numpy array holding the final Jacobian.  This is fit.jac, where fit is the output of scipy.optimize.least_squares.",
      "checksum": {
        "hash": "df6ba9aa1e3da8275386e3c3aea942bacde0805f067900a36c65670314a8d03e",
        "algorithm": {
          "tag": "sha256",
          "@type": "Thing"
        }
      }
    },
    {
      "@id": "cmps/README.txt",
      "@type": [
        "nrdp:DataFile",
        "nrdp:DownloadableFile",
        "dcat:Distribution"
      ],
      "_extensionSchemas": [
        "https://data.nist.gov/od/dm/nerdm-schema/pub/v0.7#/definitions/DataFile"
      ],
      "filepath": "README.txt",
      "downloadURL": "https://data.nist.gov/od/ds/mds2-3843/README.txt",
      "mediaType": "text/plain",
      "title": "README",
      "size": 10660,
      "checksum": {
        "hash": "f98f37c91578ef63f054dc8e061a5c387ec9b8af67a0ea232a0cf1077e4a1b9e",
        "algorithm": {
          "tag": "sha256",
          "@type": "Thing"
        }
      }
    },
    {
      "@id": "cmps/README_Fits.txt",
      "@type": [
        "nrdp:DataFile",
        "nrdp:DownloadableFile",
        "dcat:Distribution"
      ],
      "_extensionSchemas": [
        "https://data.nist.gov/od/dm/nerdm-schema/pub/v0.7#/definitions/DataFile"
      ],
      "filepath": "README_Fits.txt",
      "downloadURL": "https://data.nist.gov/od/ds/mds2-3843/README_Fits.txt",
      "mediaType": "text/plain",
      "title": "README_Fits",
      "size": 1257,
      "format": {
        "description": "text file"
      },
      "description": "A text file further describing the contents of the EUV HHG measurement data plotted (as markers) in the four panels Figure 6 of the referenced paper in the folder \"FinalData\".",
      "checksum": {
        "hash": "c0738f8e9a31d4bbf35386934d3a89700e72128afa79d40fd7112d09fede2fa0",
        "algorithm": {
          "tag": "sha256",
          "@type": "Thing"
        }
      }
    },
    {
      "@id": "cmps/BundayLS_fullheight",
      "@type": [
        "nrdp:DataFile",
        "nrdp:DownloadableFile",
        "dcat:Distribution"
      ],
      "_extensionSchemas": [
        "https://data.nist.gov/od/dm/nerdm-schema/pub/v0.7#/definitions/DataFile"
      ],
      "filepath": "BundayLS_fullheight",
      "downloadURL": "https://data.nist.gov/od/ds/mds2-3843/BundayLS_fullheight",
      "mediaType": "application/octet-stream",
      "format": {
        "description": "text file"
      },
      "description": "This file describes the parametric geometry of the periodic line structure in this study.  It is formatted for use with SCATMECH and pySCATMECH.",
      "title": "BundayLS_fullheight",
      "size": 1420,
      "checksum": {
        "hash": "cdbccb27a3150e3f983e10db2bd15c8cb511273ce177e0262d6335386d9b311d",
        "algorithm": {
          "tag": "sha256",
          "@type": "Thing"
        }
      }
    },
    {
      "@id": "cmps/FitMeMasked.py",
      "@type": [
        "nrdp:DataFile",
        "nrdp:DownloadableFile",
        "dcat:Distribution"
      ],
      "_extensionSchemas": [
        "https://data.nist.gov/od/dm/nerdm-schema/pub/v0.7#/definitions/DataFile"
      ],
      "filepath": "FitMeMasked.py",
      "downloadURL": "https://data.nist.gov/od/ds/mds2-3843/FitMeMasked.py",
      "mediaType": "text/x-python",
      "title": "FitMeMasked",
      "size": 1697,
      "format": {
        "description": "Python script"
      },
      "description": "A Python script that runs the fit to find the parameters of the model.  The results of the fit are included in files fit_x.npy and fit_jac.npy.",
      "checksum": {
        "hash": "b8ac962aec32bbba757b4186e17f49438f7bf17aed1622c847bea68be59374e1",
        "algorithm": {
          "tag": "sha256",
          "@type": "Thing"
        }
      }
    },
    {
      "@id": "cmps/minimizer_base_masked.py",
      "@type": [
        "nrdp:DataFile",
        "nrdp:DownloadableFile",
        "dcat:Distribution"
      ],
      "_extensionSchemas": [
        "https://data.nist.gov/od/dm/nerdm-schema/pub/v0.7#/definitions/DataFile"
      ],
      "filepath": "minimizer_base_masked.py",
      "downloadURL": "https://data.nist.gov/od/ds/mds2-3843/minimizer_base_masked.py",
      "mediaType": "text/x-python",
      "size": 7233,
      "format": {
        "description": "Python script"
      },
      "description": "A Python script that calculates the predicted intensities of a diffraction pattern. Requires multiprocessing for parallel compute, as well as pySCATMECH, numpy, and pandas.",
      "title": "minimizer_base_masked",
      "checksum": {
        "hash": "0b9a275c5dd5546090fa4b82ed31a9f2e227c73cd3cf1e64bb09a7778c98295b",
        "algorithm": {
          "tag": "sha256",
          "@type": "Thing"
        }
      }
    }
  ],
  "authors": [
    {
      "familyName": "Barnes",
      "fn": "Bryan M Barnes",
      "givenName": "Bryan",
      "middleName": "M",
      "affiliation": [
        {
          "title": "National Institute of Standards and Technology",
          "subunits": [
            "Nanoscale Device Characterization Division"
          ],
          "@type": "org:Organization",
          "@id": "ror:05xpvk416"
        }
      ],
      "orcid": "0000-0002-4764-6269",
      "@type": "foaf:Person"
    },
    {
      "familyName": "Chew",
      "fn": "Aaron  Chew",
      "givenName": "Aaron",
      "middleName": "",
      "affiliation": [
        {
          "title": "National Institute of Standards and Technology",
          "subunits": [
            "Sensor Science Division"
          ],
          "@type": "org:Organization",
          "@id": "ror:05xpvk416"
        }
      ],
      "orcid": "0000-0003-0448-6215",
      "@type": "foaf:Person"
    },
    {
      "familyName": "Jenkins",
      "fn": "Nicholas W Jenkins",
      "givenName": "Nicholas",
      "middleName": "W",
      "affiliation": [
        {
          "title": "STROBE NSF Science and Technology Center, JILA, University of Colorado Boulder",
          "@type": "org:Organization"
        }
      ],
      "orcid": "0000-0001-5725-0658",
      "@type": "foaf:Person"
    },
    {
      "familyName": "Shao",
      "fn": "Yunzhe Shao",
      "givenName": "Yunzhe",
      "middleName": "",
      "affiliation": [
        {
          "title": "STROBE NSF Science and Technology Center, JILA, University of Colorado Boulder",
          "@type": "org:Organization"
        }
      ],
      "orcid": "0009-0003-6192-5648",
      "@type": "foaf:Person"
    },
    {
      "familyName": "Sohn",
      "fn": "Martin Y Sohn",
      "givenName": "Martin",
      "middleName": "Y",
      "affiliation": [
        {
          "title": "National Institute of Standards and Technology",
          "subunits": [
            "Nanoscale Device Characterization Division"
          ],
          "@type": "org:Organization",
          "@id": "ror:05xpvk416"
        }
      ],
      "orcid": "0000-0002-5423-9450",
      "@type": "foaf:Person"
    },
    {
      "familyName": "Kline",
      "fn": "R Joseph Kline",
      "givenName": "R",
      "middleName": "Joseph",
      "affiliation": [
        {
          "title": "National Institute of Standards and Technology",
          "subunits": [
            "Materials Science and Engineering Division"
          ],
          "@type": "org:Organization",
          "@id": "ror:05xpvk416"
        }
      ],
      "orcid": "0000-0003-4693-9083",
      "@type": "foaf:Person"
    },
    {
      "familyName": "Sunday",
      "fn": "Daniel F Sunday",
      "givenName": "Daniel",
      "middleName": "F",
      "affiliation": [
        {
          "title": "National Institute of Standards and Technology",
          "subunits": [
            "Materials Science and Engineering Division"
          ],
          "@type": "org:Organization",
          "@id": "ror:05xpvk416"
        }
      ],
      "orcid": "0000-0002-6840-535X",
      "@type": "foaf:Person"
    },
    {
      "familyName": "Balakrishnan",
      "fn": "Purnima P Balakrishnan",
      "givenName": "Purnima\t",
      "middleName": "P",
      "affiliation": [
        {
          "title": "National Institute of Standards and Technology",
          "subunits": [
            "Sensor Science Division"
          ],
          "@type": "org:Organization",
          "@id": "ror:05xpvk416"
        }
      ],
      "orcid": "0000-0002-1426-669X",
      "@type": "foaf:Person"
    },
    {
      "familyName": "Germer",
      "fn": "Thomas A Germer",
      "givenName": "Thomas",
      "middleName": "A",
      "affiliation": [
        {
          "title": "National Institute of Standards and Technology",
          "subunits": [
            "Sensor Science Division"
          ],
          "@type": "org:Organization",
          "@id": "ror:05xpvk416"
        }
      ],
      "orcid": "0000-0003-4078-3508",
      "@type": "foaf:Person"
    },
    {
      "familyName": "Grantham",
      "fn": "Steven E Grantham",
      "givenName": "Steven",
      "middleName": "E",
      "affiliation": [
        {
          "title": "National Institute of Standards and Technology",
          "subunits": [
            "Sensor Science Division"
          ],
          "@type": "org:Organization",
          "@id": "ror:05xpvk416"
        }
      ],
      "orcid": "0000-0002-8218-512X",
      "@type": "foaf:Person"
    },
    {
      "familyName": "Klein",
      "fn": "Clay  Klein",
      "givenName": "Clay",
      "middleName": "",
      "affiliation": [
        {
          "title": "STROBE NSF Science and Technology Center, JILA, University of Colorado Boulder",
          "@type": "org:Organization"
        }
      ],
      "orcid": "0000-0001-8650-3933",
      "@type": "foaf:Person"
    },
    {
      "familyName": "Moffitt",
      "fn": "Stephanie L Moffitt",
      "givenName": "Stephanie",
      "middleName": "L",
      "affiliation": [
        {
          "title": "National Institute of Standards and Technology",
          "subunits": [
            "Sensor Science Division"
          ],
          "@type": "org:Organization",
          "@id": "ror:05xpvk416"
        }
      ],
      "orcid": "0000-0002-5934-9771",
      "@type": "foaf:Person"
    },
    {
      "familyName": "Shirley",
      "fn": "Eric A Shirley",
      "givenName": "Eric",
      "middleName": "A",
      "affiliation": [
        {
          "title": "National Institute of Standards and Technology",
          "subunits": [
            "Sensor Science Division"
          ],
          "@type": "org:Organization",
          "@id": "ror:05xpvk416"
        }
      ],
      "orcid": "0000-0002-0154-8647",
      "@type": "foaf:Person"
    },
    {
      "familyName": "Kapteyn",
      "fn": "Henry C Kapteyn",
      "givenName": "Henry",
      "middleName": "C",
      "affiliation": [
        {
          "title": "Kapteyn-Murnane Laboratories Inc.",
          "@type": "org:Organization"
        }
      ],
      "orcid": "0000-0001-8386-6317",
      "@type": "foaf:Person"
    },
    {
      "familyName": "Murnane",
      "fn": "Margaret M Murnane",
      "givenName": "Margaret",
      "middleName": "M",
      "affiliation": [
        {
          "title": "STROBE NSF Science and Technology Center, JILA, University of Colorado Boulder",
          "@type": "org:Organization"
        }
      ],
      "orcid": "0000-0001-9689-5432",
      "@type": "foaf:Person"
    }
  ],
  "annotated": "2025-10-10T19:33:01.659063",
  "revised": "2025-09-18T15:41:20.061858",
  "issued": null,
  "firstIssued": "2025-09-18T15:41:20.061858",
  "isPartOf": [
    {
      "@type": [
        "nrda:ScienceTheme",
        "nrdp:PublicDataResource"
      ],
      "@id": "ark:/88434/pdr0-0002",
      "title": "CHIPS Metrology Data"
    }
  ],
  "releaseHistory": {
    "@id": "ark:/88434/mds2-3843/pdr:v",
    "@type": [
      "nrdr:ReleaseHistory"
    ],
    "hasRelease": [
      {
        "version": "1.0.0",
        "issued": "2025-07-10",
        "@id": "ark:/88434/mds2-3843/pdr:v/1.0.0",
        "location": "https://data.nist.gov/od/id/ark:/88434/mds2-3843/pdr:v/1.0.0",
        "description": "initial release"
      },
      {
        "version": "1.0.1",
        "issued": "2025-10-10",
        "@id": "ark:/88434/mds2-3843/pdr:v/1.0.1",
        "location": "https://data.nist.gov/od/id/ark:/88434/mds2-3843/pdr:v/1.0.1",
        "description": "curator: add to CHIPS Metrology collection"
      }
    ]
  }
}