{
  "_schema": "https://data.nist.gov/od/dm/nerdm-schema/v0.7#",
  "@context": [
    "https://data.nist.gov/od/dm/nerdm-pub-context.jsonld",
    {
      "@base": "ark:/88434/mds2-3867"
    }
  ],
  "@type": [
    "nrdp:DataPublication",
    "nrdp:PublicDataResource",
    "dcat:Dataset"
  ],
  "_extensionSchemas": [
    "https://data.nist.gov/od/dm/nerdm-schema/pub/v0.7#/definitions/PublicDataResource"
  ],
  "@id": "ark:/88434/mds2-3867",
  "ediid": "ark:/88434/mds2-3867",
  "version": "1.0.1",
  "doi": "doi:10.18434/mds2-3867",
  "title": "Elastic-plastic AFM indentation on copper",
  "contactPoint": {
    "fn": "Gheorghe Stan",
    "hasEmail": "mailto:gheorghe.stan@nist.gov"
  },
  "modified": "2025-06-25",
  "status": "available",
  "landingPage": "https://data.nist.gov/od/id/mds2-3867",
  "description": [
    "Dataset from AFM single-step and multi-step indentations performed on hybrid-bonding copper patterns at room temperature"
  ],
  "keyword": [
    "AFM",
    "indentation",
    "contact resonance",
    "nanoscale plasticity",
    "copper",
    "advanced packaging",
    "hybrid bonding"
  ],
  "topic": [
    {
      "@type": "Concept",
      "scheme": "https://data.nist.gov/od/dm/nist-themes/v1.1",
      "tag": "Electronics: Semiconductors"
    },
    {
      "@type": "Concept",
      "scheme": "https://data.nist.gov/od/dm/nist-themes/v1.1",
      "tag": "Materials: Materials characterization"
    },
    {
      "@type": "Concept",
      "scheme": "https://data.nist.gov/od/dm/nist-themes/v1.1",
      "tag": "Materials: Metals"
    },
    {
      "@type": "Concept",
      "scheme": "https://data.nist.gov/od/dm/nist-themes/v1.1",
      "tag": "Nanotechnology: Nanomechanics"
    },
    {
      "@type": "Concept",
      "scheme": "https://data.nist.gov/od/dm/nist-themes/v1.1",
      "tag": "Nanotechnology: Nanometrology"
    },
    {
      "scheme": "https://data.nist.gov/od/dm/nist-themes-chipsmetrology/v2.0",
      "tag": "Advanced Packaging: BEOL: Wire bonding",
      "@type": "Concept"
    },
    {
      "scheme": "https://data.nist.gov/od/dm/nist-themes-chipsmetrology/v2.0",
      "tag": "Materials Research: Metal: Cu",
      "@type": "Concept"
    },
    {
      "scheme": "https://data.nist.gov/od/dm/nist-themes-chipsmetrology/v2.0",
      "tag": "Metrology: Experimental Technique: Scanning Probe: AFM",
      "@type": "Concept"
    },
    {
      "scheme": "https://data.nist.gov/od/dm/nist-themes-chipsmetrology/v2.0",
      "tag": "Metrology: Grand Challenge: 3-Enabling Metrology for Integrating Components in Advanced Packaging",
      "@type": "Concept"
    }
  ],
  "accessLevel": "public",
  "license": "https://www.nist.gov/open/license",
  "publisher": {
    "name": "National Institute of Standards and Technology",
    "@type": "org:Organization"
  },
  "language": [
    "en"
  ],
  "bureauCode": [
    "006:55"
  ],
  "programCode": [
    "006:052"
  ],
  "_editStatus": "done",
  "theme": [
    "Electronics: Semiconductors",
    "Materials: Materials characterization",
    "Materials: Metals",
    "Nanotechnology: Nanomechanics",
    "Nanotechnology: Nanometrology"
  ],
  "components": [
    {
      "@id": "cmps/3867_README.txt",
      "@type": [
        "nrdp:DataFile",
        "nrdp:DownloadableFile",
        "dcat:Distribution"
      ],
      "_extensionSchemas": [
        "https://data.nist.gov/od/dm/nerdm-schema/pub/v0.7#/definitions/DataFile"
      ],
      "filepath": "3867_README.txt",
      "downloadURL": "https://data.nist.gov/od/ds/mds2-3867/3867_README.txt",
      "mediaType": "text/plain",
      "title": "3867_README",
      "size": 13414,
      "checksum": {
        "hash": "87398bb90b9584b85a2a6be83df374ce2e5725ac3609fc445e9e7660086b7045",
        "algorithm": {
          "tag": "sha256",
          "@type": "Thing"
        }
      }
    },
    {
      "@id": "cmps/Data_Figure_5.csv",
      "@type": [
        "nrdp:DataFile",
        "nrdp:DownloadableFile",
        "dcat:Distribution"
      ],
      "_extensionSchemas": [
        "https://data.nist.gov/od/dm/nerdm-schema/pub/v0.7#/definitions/DataFile"
      ],
      "filepath": "Data_Figure_5.csv",
      "downloadURL": "https://data.nist.gov/od/ds/mds2-3867/Data_Figure_5.csv",
      "mediaType": "text/csv",
      "format": {
        "description": "csv"
      },
      "description": " Multi-step AFM-indentation experiments. (i) Topographic line scan covering two indents within a Cu pad; (ii) A subset of force-indentation depth curves with the Hertzian fits superimposed on the unloading segments; (iii) Indentation stress-strain curve with stress-strain pairs from all experiments; (iv) Empirical cumulative distribution function of the indentation yield stress from all the experiments; (v) Average force-depth envelope curve for multi-step indentation experiments.",
      "title": "Data for Figure 5",
      "size": 226063,
      "checksum": {
        "hash": "70dea99a4e902f27b163ba5a9503961d2186d5502c1a4421604a884403a76333",
        "algorithm": {
          "tag": "sha256",
          "@type": "Thing"
        }
      }
    },
    {
      "@id": "cmps/Data_Figure_2.csv",
      "@type": [
        "nrdp:DataFile",
        "nrdp:DownloadableFile",
        "dcat:Distribution"
      ],
      "_extensionSchemas": [
        "https://data.nist.gov/od/dm/nerdm-schema/pub/v0.7#/definitions/DataFile"
      ],
      "filepath": "Data_Figure_2.csv",
      "downloadURL": "https://data.nist.gov/od/ds/mds2-3867/Data_Figure_2.csv",
      "mediaType": "text/csv",
      "format": {
        "description": "csv"
      },
      "description": "CR-AFM measurements. (i) Indentation moduli over SiO2 and Cu regions as determined from CR-AFM mapping; (ii) Cross-section along the dashed line in (i); (iii) Histogram of the indentation moduli from the map shown in (a).",
      "title": "Data for Figure 2",
      "size": 11250,
      "checksum": {
        "hash": "1510e024ed287bf9c9af233ea23d44cb4d10cc7cd2afbc43ff20d6d177ee96ea",
        "algorithm": {
          "tag": "sha256",
          "@type": "Thing"
        }
      }
    },
    {
      "@id": "cmps/Data_Figure_1.csv",
      "@type": [
        "nrdp:DataFile",
        "nrdp:DownloadableFile",
        "dcat:Distribution"
      ],
      "_extensionSchemas": [
        "https://data.nist.gov/od/dm/nerdm-schema/pub/v0.7#/definitions/DataFile"
      ],
      "filepath": "Data_Figure_1.csv",
      "downloadURL": "https://data.nist.gov/od/ds/mds2-3867/Data_Figure_1.csv",
      "mediaType": "text/csv",
      "format": {
        "description": "csv"
      },
      "description": "Representative experimental curves obtained by i) Contact Resonance AFM (CR-AFM), ii) single-step, and iii) multi-step AFM indentation.",
      "title": "Data for Figure 1",
      "size": 237524,
      "checksum": {
        "hash": "e42d8ed4e8076986f036e90ddafe025b92ca50e9144165e7453ede383c2863ac",
        "algorithm": {
          "tag": "sha256",
          "@type": "Thing"
        }
      }
    },
    {
      "@id": "cmps/Data_Figure_4.csv",
      "@type": [
        "nrdp:DataFile",
        "nrdp:DownloadableFile",
        "dcat:Distribution"
      ],
      "_extensionSchemas": [
        "https://data.nist.gov/od/dm/nerdm-schema/pub/v0.7#/definitions/DataFile"
      ],
      "filepath": "Data_Figure_4.csv",
      "downloadURL": "https://data.nist.gov/od/ds/mds2-3867/Data_Figure_4.csv",
      "mediaType": "text/csv",
      "format": {
        "description": "csv"
      },
      "description": "AFM single-step indentation comparison of grain boundary (GBdry) and grain interior (GInt) plasticity. (i) Average force-indentation depth curves; (ii) Histogram fits for plastic metrics (number of pop-ins per indentation curve, plasticity index, cumulative excursion length, plastic work); (iii) Empirical cumulative distribution (ecdf) of maximum shear stress at fist pop-in.",
      "title": "Data for Figure 4",
      "size": 324277,
      "checksum": {
        "hash": "4c29bb6b5d349d3cf2dd8e0607ab180a8efcee8671653fc06673965af86a094e",
        "algorithm": {
          "tag": "sha256",
          "@type": "Thing"
        }
      }
    },
    {
      "@id": "cmps/Data_Figure_3.csv",
      "@type": [
        "nrdp:DataFile",
        "nrdp:DownloadableFile",
        "dcat:Distribution"
      ],
      "_extensionSchemas": [
        "https://data.nist.gov/od/dm/nerdm-schema/pub/v0.7#/definitions/DataFile"
      ],
      "filepath": "Data_Figure_3.csv",
      "downloadURL": "https://data.nist.gov/od/ds/mds2-3867/Data_Figure_3.csv",
      "mediaType": "text/csv",
      "format": {
        "description": "csv"
      },
      "description": "AFM single-step indentation characterization on Cu pads. (a) Characteristic force-displacement curve; (b) Average force-indentation depth curves, with one standard deviation; (c) Histogram fits for plastic metrics: number of pop-ins per indentation curve, plasticity index, cumulative excursion length, and plastic work; (d) Empirical cumulative distribution (ecdf) of maximum shear stress at the first pop-in event.",
      "title": "Data for Figure 3",
      "size": 340357,
      "checksum": {
        "hash": "124343cb1760b4f4e76740850b85c1b8464345bd36901120f09da407cc987976",
        "algorithm": {
          "tag": "sha256",
          "@type": "Thing"
        }
      }
    }
  ],
  "authors": [
    {
      "familyName": "Stan",
      "fn": "Gheorghe  Stan",
      "givenName": "Gheorghe",
      "middleName": "",
      "affiliation": [
        {
          "title": "National Institute of Standards and Technology",
          "subunits": [
            "Materials Science Measurement Division"
          ],
          "@type": "org:Organization",
          "@id": "ror:05xpvk416"
        }
      ],
      "orcid": "0000-0001-5773-0328",
      "@type": "foaf:Person"
    },
    {
      "familyName": "Alderete",
      "fn": "Nicolas  Alderete",
      "givenName": "Nicolas",
      "middleName": "",
      "affiliation": [
        {
          "title": "National Institute of Standards and Technology",
          "subunits": [
            "Materials Science Measurement Division"
          ],
          "@type": "org:Organization",
          "@id": "ror:05xpvk416"
        }
      ],
      "orcid": "0000-0002-2145-8825",
      "@type": "foaf:Person"
    }
  ],
  "annotated": "2025-10-11T13:44:58.099408",
  "revised": "2025-08-21T14:18:19.187020",
  "issued": null,
  "firstIssued": "2025-08-21T14:18:19.187020",
  "isPartOf": [
    {
      "@type": [
        "nrda:ScienceTheme",
        "nrdp:PublicDataResource"
      ],
      "@id": "ark:/88434/pdr0-0002",
      "title": "CHIPS Metrology Data"
    }
  ],
  "releaseHistory": {
    "@id": "ark:/88434/mds2-3867/pdr:v",
    "@type": [
      "nrdr:ReleaseHistory"
    ],
    "hasRelease": [
      {
        "version": "1.0.0",
        "issued": "2025-06-25",
        "@id": "ark:/88434/mds2-3867/pdr:v/1.0.0",
        "location": "https://data.nist.gov/od/id/ark:/88434/mds2-3867/pdr:v/1.0.0",
        "description": "initial release"
      },
      {
        "version": "1.0.1",
        "issued": "2025-10-11",
        "@id": "ark:/88434/mds2-3867/pdr:v/1.0.1",
        "location": "https://data.nist.gov/od/id/ark:/88434/mds2-3867/pdr:v/1.0.1",
        "description": "initial release"
      }
    ]
  }
}