{
  "_schema": "https://data.nist.gov/od/dm/nerdm-schema/v0.7#",
  "firstIssued": "2024-04-11",
  "issued": "2024-04-11",
  "modified": "2024-04-11",
  "annotated": "2025-10-11",
  "topic": [
    {
      "scheme": "https://data.nist.gov/od/dm/nist-themes/v1.1",
      "tag": "Materials: Ceramics",
      "@type": "Concept"
    },
    {
      "scheme": "https://data.nist.gov/od/dm/nist-themes/v1.1",
      "tag": "Standards: Reference data",
      "@type": "Concept"
    },
    {
      "tag": "Physics: Condensed matter",
      "scheme": "https://data.nist.gov/od/dm/nist-themes/v1.0",
      "@type": "Concept"
    },
    {
      "tag": "Materials: Modeling and computational material science",
      "scheme": "https://data.nist.gov/od/dm/nist-themes/v1.0",
      "@type": "Concept"
    },
    {
      "tag": "Electronics: Thin-film electronics",
      "scheme": "https://data.nist.gov/od/dm/nist-themes/v1.0",
      "@type": "Concept"
    },
    {
      "tag": "Electronics: Optoelectronics",
      "scheme": "https://data.nist.gov/od/dm/nist-themes/v1.0",
      "@type": "Concept"
    },
    {
      "tag": "Chemistry: Molecular characterization",
      "scheme": "https://data.nist.gov/od/dm/nist-themes/v1.0",
      "@type": "Concept"
    },
    {
      "tag": "Chemistry: Theoretical chemistry and modeling",
      "scheme": "https://data.nist.gov/od/dm/nist-themes/v1.0",
      "@type": "Concept"
    },
    {
      "tag": "Nanotechnology:Nanoelectronics",
      "scheme": "https://data.nist.gov/od/dm/nist-themes/v1.0",
      "@type": "Concept"
    },
    {
      "tag": "Chemistry: Chemical thermodynamics and chemical properties",
      "scheme": "https://data.nist.gov/od/dm/nist-themes/v1.0",
      "@type": "Concept"
    },
    {
      "tag": "Electronics: Semiconductors",
      "scheme": "https://data.nist.gov/od/dm/nist-themes/v1.0",
      "@type": "Concept"
    },
    {
      "tag": "Materials: Materials characterization",
      "scheme": "https://data.nist.gov/od/dm/nist-themes/v1.0",
      "@type": "Concept"
    },
    {
      "tag": "Physics: Optical physics",
      "scheme": "https://data.nist.gov/od/dm/nist-themes/v1.0",
      "@type": "Concept"
    }
  ],
  "_extensionSchemas": [
    "https://data.nist.gov/od/dm/nerdm-schema/pub/v0.7#/definitions/PublicDataResource",
    "https://data.nist.gov/od/dm/nerdm-schema/agg/v0.2#/definitions/ScienceTheme"
  ],
  "landingPage": "https://data.nist.gov/od/id/ark:/88434/pdr0-0002",
  "title": "CHIPS METIS Data Collection",
  "version": "1.0.2",
  "programCode": [
    "006:045"
  ],
  "@context": [
    "https://data.nist.gov/od/dm/nerdm-pub-context.jsonld",
    {
      "@base": "ark:/88434/pdr0-0002"
    }
  ],
  "description": [
    "This collection portal provides finding aids for the CHIPS Metrology Exchange to Innovate for Semiconductors (METIS) digital assets including data, code, and a variety of resources. It spans multiple discipline areas: Materials Research, Metrology, Advanced Packaging, Semiconductors, Simulations, Microelectronics, and will evolve in alignment with the CHIPS Metrology program.  In addition to NIST physical reference materials, these digital assets support commercial industry and partner laboratories validation of their analytical methods.  The collection data is curated to promote provenance and traceability through use of standards and best practices in data driven systems."
  ],
  "language": [
    "en"
  ],
  "bureauCode": [
    "006:55"
  ],
  "contactPoint": {
    "hasEmail": "mailto:metis@nist.gov",
    "fn": "METIS Project Team"
  },
  "accessLevel": "public",
  "@id": "ark:/88434/pdr0-0002",
  "publisher": {
    "name": "National Institute of Standards and Technology",
    "@type": "org:Organization"
  },
  "license": "https://www.nist.gov/open/license",
  "keyword": [
    "semiconductors",
    "microelectronics",
    "semiconductor metrology",
    "advanced packaging",
    "CHIPS research",
    "Semiconductor metrology",
    "CHIPS R&D"
  ],
  "facilitators": [
    {
      "jobTitle": "CHIPS Metrology Director",
      "familyName": "Rebecca",
      "givenName": "Routson",
      "@type": "foaf:Person",
      "fn": "Rebecca Routson"
    },
    {
      "jobTitle": "CHIPS Metrology Deputy Director",
      "familyName": "Schwaderer",
      "givenName": "Marcus",
      "@type": "foaf:Person",
      "fn": "Marcus Schwaderer"
    },
    {
      "jobTitle": "Grand Challenge Program Manager",
      "familyName": "Keller",
      "givenName": "Bob",
      "@type": "foaf:Person",
      "fn": "Bob Keller"
    },
    {
      "jobTitle": "Grand Challenge Program Manager",
      "familyName": "Nandi",
      "givenName": "Antara",
      "@type": "foaf:Person",
      "fn": "Antara Nandi"
    },
    {
      "jobTitle": "Grand Challenge Program Manager",
      "familyName": "Lu",
      "givenName": "Daniel",
      "@type": "foaf:Person",
      "fn": "Daniel Lu"
    },
    {
      "jobTitle": "Grand Challenge Program Manager",
      "familyName": "Kahn",
      "givenName": "Jason",
      "@type": "foaf:Person",
      "fn": "Jason Kahn"
    },
    {
      "jobTitle": "Grand Challenge Program Manager",
      "familyName": "Obeng",
      "givenName": "Yaw",
      "@type": "foaf:Person",
      "fn": "Yaw Obeng"
    },
    {
      "jobTitle": "Data Management Program Manager",
      "familyName": "Lau",
      "givenName": "June",
      "@type": "foaf:Person",
      "fn": "June Lau"
    }
  ],
  "ediid": "ark:/88434/pdr0-0002",
  "components": [
    {
      "accessURL": "https://data.nist.gov/sdp/#/search?q=isPartOf.@id%3Dark:/88434/pdr0-0002&alternateView=chips",
      "description": "The search URL here queries all the data which is part of CHIPS Metrology data collection.",
      "@type": [
        "nrda:DynamicResourceSet",
        "nrdp:SearchPage"
      ],
      "searchURL": "/rmm/records?isPartOf.@id=ark:/88434/pdr0-0002&sort.desc=annotated",
      "title": "CHIPS Metrology Data",
      "_extensionSchemas": [
        "https://data.nist.gov/od/dm/nerdm-schema/pub/v0.7#/definitions/SearchPage",
        "https://data.nist.gov/od/dm/nerdm-schema/agg/v0.2#/definitions/DynamicResourceSet"
      ]
    },
    {
      "accessURL": "https://www.nist.gov/metis",
      "@type": [
        "nrdp:AccessPage",
        "dcat:Distribution"
      ],
      "_extensionSchemas": [
        "https://data.nist.gov/od/dm/nerdm-schema/pub/v0.7#/definitions/AccessPage"
      ],
      "description": "CHIPS METIS Web Portal",
      "title": "CHIPS METIS Website"
    },
    {
      "accessURL": "https://www.nist.gov/chips/research-development-programs/metrology-program",
      "@type": [
        "nrdp:AccessPage",
        "dcat:Distribution"
      ],
      "_extensionSchemas": [
        "https://data.nist.gov/od/dm/nerdm-schema/pub/v0.7#/definitions/AccessPage"
      ],
      "description": "NIST CHIPS Metrology oveview, areas of research and practice",
      "title": "NIST CHIPS Metrology Website"
    }
  ],
  "@type": [
    "nrda:ScienceTheme",
    "nrdp:PublicDataResource"
  ],
  "releaseHistory": {
    "@id": "ark:/88434/pdr0-0002/pdr:v",
    "@type": [
      "nrdr:ReleaseHistory"
    ],
    "hasRelease": [
      {
        "issued": "2024-04-11",
        "version": "1.0.0",
        "@id": "ark:/88434/pdr0-0002/pdr:v/1.0.0",
        "location": "https://data.nist.gov/od/id/ark:/88434/pdr0-0002/pdr:v/1.0.0",
        "description": "initial release"
      },
      {
        "issued": "2025-06-25",
        "version": "1.0.1",
        "@id": "ark:/88434/pdr0-0002/pdr:v/1.0.1",
        "location": "https://data.nist.gov/od/id/ark:/88434/pdr0-0002/pdr:v/1.0.1",
        "description": "order member dataset by update date (annotated)"
      },
      {
        "issued": "2025-10-11",
        "version": "1.0.2",
        "@id": "ark:/88434/pdr0-0002/pdr:v/1.0.2",
        "location": "https://data.nist.gov/od/id/ark:/88434/pdr0-0002/pdr:v/1.0.2",
        "description": "updated facilitators"
      }
    ]
  }
}