Public Data Resource

Supporting Data for Selected Area Electron Beam Induced Deposition of Pt and W for EBSD Backgrounds

Contact: William Osborn..
Identifier: doi:10.18434/T4/1503158
Version: 1.0

Description

These are the unprocessed electron back scatter diffraction patterns (EBSPs) collected from the mesas of electron beam induced deposition (EBID) material, in addition to the Mathematica notebook used to process the images. Each of the 12 EBID mesa has 10 EBSPs collected at 20 kV and 10 kV, in addition to several longer line scans that step from the silicon substrate onto the EBID mesa.
Research Topics: Materials:Materials characterization, Nanotechnology:Nanomechanics, Nanotechnology:Nanometrology, Electronics:Semiconductors    
Subject Keywords: Electron Back Scatter Diffraction, EBSD, flat field, background subtraction, Electron Beam Induced Deposition, EBID, Pt, W    

Data Access

These data are public.
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About This Dataset

Version: 1.0
Cite this dataset
William Osborn (2018), Supporting Data for Selected Area Electron Beam Induced Deposition of Pt and W for EBSD Backgrounds, National Institute of Standards and Technology, https://doi.org/10.18434/T4/1503158 (Accessed 2024-04-21)
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