Public Data Resource

X-ray Metrology for the Semiconductor Industry Tutorial

Part of the CHIPS METIS Data Collection

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Contact: Regis Kline.

Identifier: doi:10.18434/T4/1503330

Version: 1.0...

Video tutorials from NIST workshop on X-ray metrology for the semiconductor industry

Research Areas

CHIPS Metrology: Metrology: Experimental Technique: Diffraction and Scattering: X-ray

Keywords: Semiconductor metrologydimensional metrologysmall angle x-ray scattering

These data are public.

For more information, please visit the home page.

Version: 1.0...

This dataset is part of the CHIPS METIS Data Collection.

Cite this dataset

Regis Kline (2018), X-ray Metrology for the Semiconductor Industry Tutorial, National Institute of Standards and Technology, https://doi.org/10.18434/T4/1503330 (Accessed 2025-07-16)

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