Standard Reference Data

NIST MEMS Calculator - SRD 166

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Contact: Richard Allen.

Identifier: ark:/88434/mds00dt7rm

Described in these articles:

http://pml.nist.gov/test-structures/10-FilesToDownload/FCMN.2013.pdf,

http://pml.nist.gov/test-structures/10-FilesToDownload/ICMTS.2012.pdf,

https://www.nist.gov/news-events/news/2013/04/new-nist-measurement-tool-target-fast-growing-mems-industry,

http://ws680.nist.gov/publication/get_pdf.cfm?pub_id=914939,

http://ws680.nist.gov/publication/get_pdf.cfm?pub_id=909186,

https://dx.doi.org/10.6028/NIST.SP.260-177

Version: 1.0

This MEMS Calculator determines the following thin film properties from data taken with an optical interferometer or comparable instrument: a) residual strain from fixed-fixed beams, b) strain gradient from cantilevers, c) step heights or thicknesses from step-height test structures, and d) in-plane lengths or deflections. Then, residual stress and stress gradient calculations can be made after an optical vibrometer or comparable instrument is used to obtain Young's modulus from resonating cantilevers or fixed-fixed beams. In addition, wafer bond strength is determined from micro-chevron test structures using a material test machine.

Research Areas

NIST R&D: Standards: Reference materialsElectronics: SemiconductorsStandards: Reference data

Keywords: ASTMMEMS 5 in 1MEMS CalculatorsMicro Electro Mechanical SystemsSemiconductor Equipment and Materials InternationalShow more...

These data are public.

For more information, please visit the home page.

Data and related material can be found at the following locations:

https://dx.doi.org/10.18434/T4CS3T

http://pml.nist.gov/test-structures/10-FilesToDownload/FCMN.2013.pdf

http://pml.nist.gov/test-structures/10-FilesToDownload/ICMTS.2012.pdf

https://www.nist.gov/news-events/news/2013/04/new-nist-measurement-tool-target-fast-growing-mems-industry

http://ws680.nist.gov/publication/get_pdf.cfm?pub_id=914939

http://ws680.nist.gov/publication/get_pdf.cfm?pub_id=909186

https://dx.doi.org/10.6028/NIST.SP.260-177

Version: 1.0

Cite this dataset

Richard Allen (2014), NIST MEMS Calculator - SRD 166, National Institute of Standards and Technology, http://pml.nist.gov/test-structures/MEMSCalculator.htm (Accessed 2025-06-17)

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