Data Publication

Data for manuscript: Integrated photonic optomechanical atomic force microscopy probes batch fabricated using deep UV photolithography

Diego J. Perez-Morello Author's orcid, Mingkang Wang Author's orcid, Venkatesh Madhaven, Mogana Sathisivan, Charlie Tay, Vladimir Aksyuk Author's orcid
Contact: Vladimir Aksyuk..
Identifier: doi:10.18434/mds2-2815
Version: 1.1... First Released: 2022-10-14 Revised: 2023-04-10
Data from figure 4 "Measuring photonic optomechanical devices" in manuscript "Integrated photonic optomechanical atomic force microscopy probes batch fabricated using deep UV photolithography," in Journal of Microelectromechanical Systems, doi: 10.1109/JMEMS.2023.3247300.
Research Areas
NIST R&D: Nanotechnology: Nanofabrication/manufacturingNanotechnology: NanomechanicsNanotechnology: Nanophotonics
Keywords: integrated photonicscavity optomechanical sensors
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Version: 1.1... First Released: 2022-10-14 Revised: 2023-04-10
Cite this dataset
Diego J. Perez-Morello, Mingkang Wang, Venkatesh Madhaven, Mogana Sathisivan, Charlie Tay, Vladimir Aksyuk (2022), Data for manuscript: Integrated photonic optomechanical atomic force microscopy probes batch fabricated using deep UV photolithography, National Institute of Standards and Technology, https://doi.org/10.18434/mds2-2815 (Accessed 2024-11-03)
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